Abstract: An optical measuring system is used to reproduce a target wavefront of an imaging optical production system when an object is illuminated with illumination light. The optical measuring system comprises an object holder displaceable by actuator means and at least one optical component displaceable by actuator means. Within the scope of the target wavefront reproduction, a starting actuator position set (X0), in which each actuator is assigned a starting actuator position, is initially specified. An expected design wavefront (WD) which approximates the target wavefront and which the optical measuring system produces as a set wavefront is determined. A coarse measurement of a starting wavefront (W0) which the optical measuring system produces as actual wavefront after actually setting the starting actuator position set (X0) is carried out.

Abstract: An optical measuring system is used to reproduce a target wavefront of an imaging optical production system when an object is illuminated with illumination light. The optical measuring system comprises an object holder displaceable by actuator means and at least one optical component displaceable by actuator means. Within the scope of the target wavefront reproduction, a starting actuator position set (X0), in which each actuator is assigned a starting actuator position, is initially specified. An expected design wavefront (WD) which approximates the target wavefront and which the optical measuring system produces as a set wavefront is determined. A coarse measurement of a starting wavefront (W0) which the optical measuring system produces as actual wavefront after actually setting the starting actuator position set (X0) is carried out.

Abstract: For approximating imaging properties of an optical production system which images an object to imaging properties of an optical measurement system when imaging the object, which imaging properties arise from an adjustment displacement of at least one component (Mi) of the optical measurement system, the following procedure is carried out: A production transfer function of the imaging is determined by the production system as a target transfer function. The production transfer function depends on an illumination setting for an object illumination. This determination is implemented for a target illumination setting. Furthermore, a measurement transfer function of the imaging is determined by the measurement system as an actual transfer function. The measurement transfer function likewise depends on the illumination setting for the object illumination. This determination is also implemented for the target illumination setting.