Patents by Inventor Daniel R. Koshak

Daniel R. Koshak has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 5785518
    Abstract: A fixture for holding a plurality of masking elements while the masking elements are being baked to remove impurities is disclosed. The masking elements are used to mask dies used for forming sputtering targets used to deposit thin films on a substrate. The fixture includes a housing having first and second end walls connected between first and second side walls wherein the first and second end and side walls form an interior aperture. In addition, the fixture includes a several slots which are formed in the first and second side walls wherein each of the slots are suitable for holding a single masking element. In particular, the interior aperture is of a sufficient size and the slots are positioned such that suitable air circulation is provided between each of the masking elements to expose the masking elements to a predetermined temperature suitable for removing the impurities from the masking elements.
    Type: Grant
    Filed: September 30, 1994
    Date of Patent: July 28, 1998
    Assignees: Sony Corporation, Materials Research Corporation
    Inventor: Daniel R. Koshak