Patents by Inventor Daniel R. Mantell

Daniel R. Mantell has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for metal nitride deposition
    Patent number: 4832986
    Abstract: A method for forming metal nitride films is provided comprising employing the techniques of chemical vapor deposition to thermally decompose a vapor comprising a dialkyl(Group III metal) azide, so as to deposit a film of the corresponding metal nitride on the surface of a substrate.
    Type: Grant
    Filed: July 6, 1987
    Date of Patent: May 23, 1989
    Assignee: Regents of the University of Minnesota
    Inventors: Wayne L. Gladfelter, Daniel R. Mantell, John F. Evans, Roland K. Schulze