Patents by Inventor Daniel R. Trojan

Daniel R. Trojan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10315286
    Abstract: A system includes a CMP carrier that includes a resilient flexible membrane upon which a wafer is mounted, at least three ports for supplying air to the resilient flexible membrane to pneumatically pushing on the wafer through pressure applied throughout the surface area of the resilient flexible membrane to have more uniform pressure. Each port provides pressure to different components of the carrier to adjust pressure or vary pressure during processing of the wafer. Further, the system includes a processor and software program for implementing the CMP carrier with existing CMP machines. The software application converts the air pressure applied to the carrier into units that allow the CMP machine to receive expected data and operate in accordance with the existing commands.
    Type: Grant
    Filed: June 7, 2017
    Date of Patent: June 11, 2019
    Assignee: AXUS TECHNOLOGI, LLC
    Inventors: Daniel R. Trojan, Richard Ciszek, Clifford Daniel
  • Publication number: 20170355062
    Abstract: A system includes a CMP carrier that includes a resilient flexible membrane upon which a wafer is mounted, at least three ports for supplying air to the resilient flexible membrane to pneumatically pushing on the wafer through pressure applied throughout the surface area of the resilient flexible membrane to have more uniform pressure. Each port provides pressure to different components of the carrier to adjust pressure or vary pressure during processing of the wafer. Further, the system includes a processor and software program for implementing the CMP carrier with existing CMP machines. The software application converts the air pressure applied to the carrier into units that allow the CMP machine to receive expected data and operate in accordance with the existing commands.
    Type: Application
    Filed: June 7, 2017
    Publication date: December 14, 2017
    Inventors: Daniel R. Trojan, Richard Ciszek, Clifford Daniel
  • Patent number: 9390903
    Abstract: A workpiece processing apparatus is provided. The apparatus includes a rotary turntable having one or more spindles thereon, the turntable being configured to rotate about a turntable axis. Each of the spindles is configured to receive and secure thereon a workpiece to be processed by the apparatus. Each of the spindles can rotate about their own independent axes. The apparatus includes one or more grind spindles that overlay the turntable and are configured to communicate with the workpieces. The apparatus processes the workpieces by transitioning between first and second operational states. The first operational state centers the spindles and the workpieces thereon under the grind spindle to condition an entire top surface of the workpieces. The second operational state offsets the spindles from the center of the grind spindle to condition a perimeter edge of the workpieces. A controller can govern the transition between first and second operational states.
    Type: Grant
    Filed: September 9, 2013
    Date of Patent: July 12, 2016
    Assignee: AXUS TECHNOLOGY, LLC
    Inventors: Daniel R. Trojan, Richard Ciszek, Clifford Daniel
  • Patent number: 8944887
    Abstract: An apparatus for performing both edge trimming and surface grinding includes two spindles for holding two workpieces, a bridge element laterally movable relative to the spindles, and two grinding wheels coupled to the bridge element. The apparatus may be a surface grinding apparatus that includes a system for enabling the surface grinding apparatus to additionally perform edge trimming. A method for processing the workpieces entails placing the two workpieces on the two spindles of the apparatus, directing the bridge element to move laterally to an edge trimming position to trim the outer edge of one workpiece using one of the grinding wheels, to move laterally to another edge trimming position to trim the outer edge of the other workpiece using one of the grinding wheels, and to move laterally to surface grinding positions to perform surface grinding on both of the workpieces using one or both of the grinding wheels.
    Type: Grant
    Filed: August 12, 2011
    Date of Patent: February 3, 2015
    Assignee: Axus Technology, LLC
    Inventors: Daniel R. Trojan, Richard Ciszek, Clifford Daniel
  • Publication number: 20140073223
    Abstract: A workpiece processing apparatus is provided. The apparatus includes a rotary turntable having one or more spindles thereon, the turntable being configured to rotate about a turntable axis. Each of the spindles is configured to receive and secure thereon a workpiece to be processed by the apparatus. Each of the spindles can rotate about their own independent axes. The apparatus includes one or more grind spindles that overlay the turntable and are configured to communicate with the workpieces. The apparatus processes the workpieces by transitioning between first and second operational states. The first operational state centers the spindles and the workpieces thereon under the grind spindle to condition an entire top surface of the workpieces. The second operational state offsets the spindles from the center of the grind spindle to condition a perimeter edge of the workpieces. A controller can govern the transition between first and second operational states.
    Type: Application
    Filed: September 9, 2013
    Publication date: March 13, 2014
    Applicant: AXUS TECHNOLOGY, LLC
    Inventors: Daniel R. Trojan, Richard Ciszek, Clifford Daniel
  • Publication number: 20120202406
    Abstract: An apparatus for performing both edge trimming and surface grinding includes two spindles for holding two workpieces, a bridge element laterally movable relative to the spindles, and two grinding wheels coupled to the bridge element. The apparatus may be a surface grinding apparatus that includes a system for enabling the surface grinding apparatus to additionally perform edge trimming. A method for processing the workpieces entails placing the two workpieces on the two spindles of the apparatus, directing the bridge element to move laterally to an edge trimming position to trim the outer edge of one workpiece using one of the grinding wheels, to move laterally to another edge trimming position to trim the outer edge of the other workpiece using one of the grinding wheels, and to move laterally to surface grinding positions to perform surface grinding on both of the workpieces using one or both of the grinding wheels.
    Type: Application
    Filed: August 12, 2011
    Publication date: August 9, 2012
    Applicant: AXUS TECHNOLOGY, LLC
    Inventors: Daniel R. Trojan, Richard Ciszek, Clifford Daniel
  • Patent number: 7540799
    Abstract: A system (46) for adjusting an end effector (48) of an apparatus (44) includes a linear actuator (58) attachable with an arm (52) of the apparatus (44). The system (46) further includes a first link member (64) having a first segment (68) operatively coupled with the linear actuator (58), and a second link member (66) maintained in parallel alignment with a second segment (70) of the first link member (64). The first and second link members (64, 66) pivotally attach to the end effector (48), and movement of the first segment (68) powered by the actuator (58) causes the first and second link members (64, 66) to pivot producing movement of the end effector (48) relative to a workpiece (26). A force transducer (76) interposed between the actuator (58) and the first link member (64) is utilized to control a pressure of the end effector (48) against the workpiece (26).
    Type: Grant
    Filed: February 26, 2007
    Date of Patent: June 2, 2009
    Inventor: Daniel R. Trojan
  • Patent number: 6125861
    Abstract: The present invention provides an apparatus for cleaning semiconductor workpieces following a Chemical Mechanical Planarization ("CMP") procedure. Initially, a workpiece is scrubbed to remove some of the slurry material and other contaminants on the surfaces of the workpiece. Next, the workpiece is transported into a chemical-etch cleaning station wherein the workpiece is positioned horizontally such that both the upper and lower surfaces are substantially exposed. The workpiece then is immersed in a cleaning solution which is moved around the various surfaces of the workpiece. The workpiece is immersed in the cleaning solution for a sufficient length of time to remove an appropriate layer of oxide, thereby removing contaminants and smoothing micro scratches from the surfaces of the workpiece.
    Type: Grant
    Filed: April 10, 1998
    Date of Patent: October 3, 2000
    Assignee: SpeedFam-IPEC Corporation
    Inventors: Anand Gupta, Chris Karlsrud, Periya Gopalan, Daniel R. Trojan, Jeffrey B. Cunnane, Jon R. MacErnie
  • Patent number: 6116990
    Abstract: A low profile gimbal system is provided to greatly reduce the generation of moments about a pivot point of the gimbal system during polishing processes. The gimbal system is adjustable so that a preferred balance between stiffness and friction may be selected as appropriate for a variety of different polishing conditions. A locking feature ensures that the adjustment setting is maintained during polishing.
    Type: Grant
    Filed: February 9, 1999
    Date of Patent: September 12, 2000
    Assignee: Applied Materials, Inc.
    Inventors: James Sinclair, Daniel R. Trojan, Lawrence L. Lee
  • Patent number: 5899798
    Abstract: A low profile, low hysteresis force feedback gimbal system is provided to greatly reduce the generation of moments about a pivot point of the gimbal system during polishing processes. A load cell is placed directly above a contact pin of the gimbal system to provide a very accurate feedback measurement of the amount of downward load applied to a substrate during polishing.
    Type: Grant
    Filed: July 25, 1997
    Date of Patent: May 4, 1999
    Assignee: Obsidian Inc.
    Inventors: Daniel R. Trojan, Lawrence L. Lee