Abstract: Disclosed are synthetic silica glass body with a birefringence pattern having low fast axis direction randomness factor and glass reflow process. The glass reflow process comprises steps of: providing a glass tube having a notch; and thermally reflowing the glass tube to form a glass plate. The process can be advantageously used to produce fused silica glass plate without observable striae when viewed in the direction of optical axis. Also disclosed are optical members comprising the fused silica glass body and a process for reflowing glass cylinders.

Abstract: A fused silica glass article having a low absolute refractive index and low concentrations of hydroxyl groups, halogens, and metal having a low absolute refractive index. The glass article contains less than about 10 ppm protium-containing and deuterium-containing hydroxyl groups by weight and less than about 20 ppm halogens by weight. The silica glass article also has an absolute refractive index (ARI) less than or equal to 1.560820. In one embodiment, the ARI of the fused silica article is achieved by lowering the fictive temperature of the fused silica. A method of lowering the fictive temperature is also described.

Abstract: A method of making a fused silica plate includes providing a fused silica blank having a length, a longitudinal axis, and an outer diameter. The method further includes forming a slot in the fused silica blank which extends from the outer diameter to a location at or offset from a center of the fused silica blank and is substantially parallel to the longitudinal axis of the fused silica blank. The slot is defined by a concave surface located at or offset from the center of the fused silica blank, a first side surface extending between a first edge of the concave surface and the outer diameter of the fused silica blank, and a second side surface extending between a second edge of the concave surface and the outer diameter of the fused silica blank. At least one of the first and second side surfaces are connected to the concave surface by a chamfered surface. The method further includes rolling out the fused silica blank having the slot to form a fused silica plate.

Abstract: A fused silica glass article having a low absolute refractive index and low concentrations of hydroxyl groups, halogens, and metal having a low absolute refractive index. The glass article contains less than about 10 ppm protium-containing and deuterium-containing hydroxyl groups by weight and less than about 20 ppm halogens by weight. The silica glass article also has an absolute refractive index (ARI) less than or equal to 1.560820. In one embodiment, the ARI of the fused silica article is achieved by lowering the fictive temperature of the fused silica. A method of lowering the fictive temperature is also described.

Abstract: A method of making a fused silica plate includes providing a fused silica blank having a length, a longitudinal axis, and an outer diameter. The method further includes forming a slot in the fused silica blank which extends from the outer diameter to a location at or offset from a center of the fused silica blank and is substantially parallel to the longitudinal axis of the fused silica blank. The slot is defined by a concave surface located at or offset from the center of the fused silica blank, a first side surface extending between a first edge of the concave surface and the outer diameter of the fused silica blank, and a second side surface extending between a second edge of the concave surface and the outer diameter of the fused silica blank. At least one of the first and second side surfaces are connected to the concave surface by a chamfered surface. The method further includes rolling out the fused silica blank having the slot to form a fused silica plate.

Abstract: Disclosed is a method for treating glass and crystalline inorganic materials whereby metal contamination during such process is inhibited. Such process includes treating the material in the presence of a purifying atmosphere comprising a cleansing gas. The process is especially advantageous for treating high purity fused silica glass for use in advanced lithographic devices.

Abstract: Disclosed are synthetic silica glass body with a birefringence pattern having low fast axis direction randomness factor and glass reflow process. The glass reflow process comprises steps of: providing a glass tube having a notch; and thermally reflowing the glass tube to form a glass plate. The process can be advantageously used to produce fused silica glass plate without observable striae when viewed in the direction of optical axis. Also disclosed are optical members comprising the fused silica glass body and a process for reflowing glass cylinders.

Abstract: A fused silica glass having a composition for use in bulk IR optical applications. The fused silica glass has a OH concentration of less than 5 ppm (parts per million) by weight and an absorbance of less than about 50 ppm/cm at a wavelength of about 1.3 ?m. A method of making the fused silica glass is also described.