Abstract: Optoelectronic probe cards, optoelectronic testers, and related methods. The optoelectronic probe cards are configured for optical and electrical communication with a device under test (DUT) on a device substrate that includes a plurality of DUTs and includes an optical probe assembly and an electrical probe assembly. The optical probe assembly includes a plurality of lensed optical probes configured for non-contact optical communication with at least one optoelectronic device of the DUT. The electrical probe assembly includes a plurality of electrical probes configured for electrical communication with the DUT via electrical contact between the plurality of electrical probes and a plurality of contact pads of the DUT. The optoelectronic testers include a chuck, the optoelectronic probe card, an optical signal generation and analysis assembly, and an electrical signal generation and analysis assembly.

Abstract: Optical calibration structures for optical probes, optical probe systems that include the optical calibration structures, and methods of calibrating a plurality of optical probes. The optical calibration structures include a reflector, an obstructive structure, and an optical detector. The optical probe systems include the optical calibration structure, a chuck, an optical assembly, and a signal generation and analysis assembly. The methods include methods of operating the optical probe systems and/or methods of utilizing the optical calibration structures.

Abstract: Lens arrays, fiber optic fixtures that include the lens arrays, probe systems that include the fiber optic fixtures, and methods of forming fiber optic fixtures are disclosed herein. The lens arrays are configured to convey a plurality of electromagnetic signals between a plurality of fiber optic conduits of a fiber optic fixture and a plurality of optical devices of a device under test (DUT). The lens arrays include a single lens block that defines a fixture-attached block side and a lensed block side. The fixture-attached block side is configured to face toward, and be operatively attached to, a fixture body of the fiber optic fixture. The lensed block side differs from the fixture-attached block side. The lens arrays also include a plurality of lenses defined on the lensed block side.

Abstract: Probe systems for optically probing a device under test (DUT) and methods of operating the probe systems. The probe systems include a probing assembly that includes an optical probe that defines a probe tip and a distance sensor. The probe systems also include a support surface configured to support a substrate, which defines a substrate surface and includes an optical device positioned below the substrate surface. The probe systems further include a positioning assembly configured to selectively regulate a relative orientation between the probing assembly and the DUT. The probe systems also include a controller programmed to control the operation of the probe systems. The methods include methods of operating the probe systems.

Abstract: Probe systems for optically probing a device under test (DUT) and methods of operating the probe systems. The probe systems include a probing assembly that includes an optical probe that defines a probe tip and a distance sensor. The probe systems also include a support surface configured to support a substrate, which defines a substrate surface and includes an optical device positioned below the substrate surface. The probe systems further include a positioning assembly configured to selectively regulate a relative orientation between the probing assembly and the DUT. The probe systems also include a controller programmed to control the operation of the probe systems. The methods include methods of operating the probe systems.

Abstract: In one embodiment, a request to perform a calibration process for automated test equipment (ATE) is received. The request is associated with one or more test setups. After receiving the request, a number of calibration padding points based on the test setups are identified. Calibration data is then generated for both the test setups and the calibration padding points. In another embodiment, a request to perform one or more calibrated test procedures using ATE is received, and in conjunction with performing at least one of the calibrated test procedures, calibration data is derived from existing calibration data.