Abstract: A method for measuring an actuator in a projection exposure apparatus for semiconductor lithography, comprises: driving and deflecting a first actuator with a constant control signal; deflecting a further actuator by way of the mechanical coupling; and determining the capacitance of the further actuator, which was deflected by way of the coupling. A projection exposure apparatus for semiconductor lithography comprises a control device and a measuring device, wherein the measuring device is configured to determine the capacitance of at least one actuator in the projection exposure apparatus.

Abstract: A valve system having a vacuum valve and a regulating unit is disclosed. The vacuum valve has a valve seat including a valve opening, a first seal surface, and a valve closure for closing the valve opening using a second seal surface. A drive unit coupled to the valve closure is designed to be adjusted to provide respective valve opening states. The regulating unit adjusts the valve opening state by actuating the drive unit based on a currently determined regulating variable and a target variable. The regulating unit has a checking function configured such that a series of states of the valve closure are detected as park of the regulating process, and the states are stored as current regulating data. The current regulating data is compared with specified target regulating data and process information is generated based on the comparison of the current and the target regulating data.

Abstract: A payload interposer (PIP) board provides an interface for hosting payloads on a space vehicle platform. Payload development may be performed via the PIP board in a manner that “abstracts” the hardware of the space vehicle from the payload developer. The PIP board may include a host side payload interface connector that connects to a space vehicle and a payload side payload interface connector that connects to a payload. Power, CDH, and other space vehicle functionality may thus be provided to the payload from the space vehicle via the PIP board.

Abstract: A compact SFS may can be deployed in small space vehicles. The SFS may have a small size, weight, and low power requirements. The hardware, software, catalogs, and calibration algorithm of the SFS provide highly accurate attitude information that can be used for pointing. For instance, accurate attitude determination may be provided that supports pointing of a deployable high gain helical antenna. A full “lost in space” attitude solution, accurate to about an arcminute, may be accomplished in under a minute. The SFS may be fully reprogrammable on orbit, allowing continued algorithm development and deployment after launch.

Abstract: Small cubesat systems may be available for a lower cost, have a higher reliability, and be much simpler to use than conventional cubesats. A complete turnkey system solution may be provided, including the ground station and remote field units. The satellite, ground station, and field unit may be provided separately as kits that are ready to go out-of-the-box as soon as they arrive. This enables universities, researchers, and hobbyists to obtain and deploy their own functional satellites. Furthermore, theoretical designs and functionality may be rapidly prototyped and demonstrated, which allows for proof-of-concept without needing to build a larger, more expensive satellite system and hope that the new design or functionality works as intended.

Abstract: A “black box” space vehicle solution may allow a payload developer to define the mission space and provide mission hardware within a predetermined volume and with predetermined connectivity. Components such as the power module, radios and boards, attitude determination and control system (ADCS), command and data handling (C&DH), etc. may all be provided as part of a “stock” (i.e., core) space vehicle. The payload provided by the payload developer may be plugged into the space vehicle payload section, tested, and launched without custom development of core space vehicle components by the payload developer. A docking station may facilitate convenient development and testing of the space vehicle while reducing handling thereof.

Abstract: A payload interposer (PIP) system and its control software provide an interface between a space vehicle and a payload. The PIP board facilitates power and communications between a command and data handler (CDH) of the space vehicle and the payload. A microcontroller of the PIP board may control operation of the payload, format messages between the space vehicle and the payload, and extract data from the payload for downlink via the space vehicle.

Abstract: A valve system having a vacuum valve and a regulating unit is disclosed. The vacuum valve has a valve seat including a valve opening, a first seal surface, and a valve closure for closing the valve opening using a second seal surface. A drive unit coupled to the valve closure is designed to be adjusted to provide respective valve opening states. The regulating unit adjusts the valve opening state by actuating the drive unit based on a currently determined regulating variable and a target variable. The regulating unit has a checking function configured such that a series of states of the valve closure are detected as park of the regulating process, and the states are stored as current regulating data. The current regulating data is compared with specified target regulating data and process information is generated based on the comparison of the current and the target regulating data.

Abstract: A vacuum valve has a valve opening (2, 3) that is surrounded by a valve seat (6, 7), a valve plate (10, 11) that releases the valve opening (2, 3) in an open state and rests against the valve seat (6, 7) in a closed state, and a carrier unit (9) that supports the valve plate (10, 11) and moves between a first position, in which the valve opening (2, 3) is in the open state, and a second position. The valve plate (10, 11) moves between a retracted position and an extended position. In the second position of the carrier unit (9) and in the extended position of the valve plate (10, 11), the valve opening (2, 3) is in the closed state. In the retracted position, the valve plate (10, 11) is supported against the carrier unit (9).

Abstract: A space vehicle may have a modular board configuration that commonly uses some or all components and a common operating system for at least some of the boards. Each modular board may have its own dedicated processing, and processing loads may be distributed. The space vehicle may be reprogrammable, and may be launched without code that enables all functionality and/or components. Code errors may be detected and the space vehicle may be reset to a working code version to prevent system failure.

Abstract: An ADCS module may be configured to use coordinate data from 2D photodiodes in one or more sun sensors to determine a sun vector. The ADCS module may then use the sun vector in reference to its own body faced (BF) coordinate system to calculate a change in the orientation of the space vehicle. The change in orientation mechanism may be accomplished by reaction wheels, ion thrusters, or other orientation altering mechanisms. A miniature, intelligent star tracker may be included that improves satellite attitude determination and pointing accuracy. An improved reaction wheel assembly may be included that is more robust and suitable for inclusion in small space vehicles.

Abstract: A vacuum valve including a valve body with first and second valve openings, first and second closure elements attached to a valve rod, a longitudinally adjustable transmission piece attached to the valve rod that is adjustable from an open position into an intermediate position, and in a transverse adjustment direction from the intermediate position into a first closing position, and counter thereto into a second closing position. The transmission piece is connected to the valve body via a longitudinal stroke linear guide and a transverse stroke linear guide having a transverse stroke guide part which extends parallel to an oblique adjustment direction and a transverse stroke carriage displaceably guided thereon. To adjust the transmission piece from the intermediate position into the first or second closing position, the transverse stroke carriage is linearly displaceable in or counter to the oblique adjustment direction from a central position into a first or second press-on position.

Abstract: A vacuum valve, having a valve seat including a valve opening (axis (A)), and a first sealing surface around the valve opening and defines a first sealing plane (ES), having a valve disk with a second sealing surface corresponding to the first sealing surface and defining a second sealing plane (ET), additionally having a first coupling element, connected to the valve disk and comprising a receiving means and a drive unit coupled with the first coupling element and is configured to provide the valve disk adjustable from an open position to a closed position. The drive unit and the valve disk are configured to provide a fine control position, wherein the valve disk is tilted relative to the valve seat where ES and ET enclose a defined angle (?), and the seal abuts fully against one of the two sealing surfaces and in part against the other sealing surface.

Abstract: A modular space vehicle chassis may facilitate convenient access to internal components of the space vehicle. Each module may be removable from the others such that each module may be worked on individually. Multiple panels of at least one of the modules may swing open or otherwise be removable, exposing large portions of the internal components of the space vehicle. Such chassis architectures may reduce the time required for and difficulty of performing maintenance or modifications, may allow multiple space vehicles to take advantage of a common chassis design, and may further allow for highly customizable space vehicles.

Abstract: A vacuum valve, including a valve body (1) with a first valve opening (2a) and with a second valve opening (2b), a first and a second closure element (4a, 4b) which are attached to a valve rod (9), a transmission piece (12) which is attached to the valve rod (9) and is adjustable in a longitudinal adjustment direction (16) from an open position into an intermediate position, and in a transverse adjustment direction (30) from the intermediate position into a first closing position, and counter to the transverse adjustment direction (30) from the intermediate position into a second closing position, where the transmission piece (12) is connected via a longitudinal stroke linear guide (13) and a transverse stroke linear guide (17), which comprises a transverse stroke guide part (19) which extends parallel to an oblique adjustment direction (20) lying obliquely with respect to the longitudinal adjustment direction (16), and a transverse stroke carriage (18) which is guided displaceably by the transverse stroke gu

Abstract: A vacuum valve is provided having a valve housing (1) with a valve opening (2, 3) that has an axis (4, 5) and is surrounded by a valve seat (6, 7), a valve plate (10, 11) that releases the valve opening (2, 3) in an open state of the valve opening (2, 3) and rests against the valve seat (6, 7) in a closed state of the valve opening (2, 3), and a carrier unit (9) that supports the valve plate (10, 11) and can be moved between a first position, in which the valve opening (2, 3) is in the open state, and a second position. The valve plate (10, 11) is connected to the carrier unit (9) via at least two spaced drive elements (20) of the carrier unit (9) and can be moved between a retracted position and an extended position by the drive elements (20). In the second position of the carrier unit (9) and in the extended position of the valve plate (10, 11), the valve opening (2, 3) is in the closed state.

Abstract: A “black box” space vehicle solution may allow a payload developer to define the mission space and provide mission hardware within a predetermined volume and with predetermined connectivity. Components such as the power module, radios and boards, attitude determination and control system (ADCS), command and data handling (C&DH), etc. may all be provided as part of a “stock” (i.e., core) space vehicle. The payload provided by the payload developer may be plugged into the space vehicle payload section, tested, and launched without custom development of core space vehicle components by the payload developer. A docking station may facilitate convenient development and testing of the space vehicle while reducing handling thereof.

Abstract: A space vehicle electromechanical system may employ an architecture that enables convenient and practical testing, reset, and retesting of solar panel and antenna deployment on the ground. A helical antenna winding fixture may facilitate winding and binding of the helical antenna.

Abstract: A vacuum valve, having a valve seat including a valve opening (axis (A)), and a first sealing surface around the valve opening and defines a first sealing plane (ES), having a valve disk with a second sealing surface corresponding to the first sealing surface and defining a second sealing plane (ET), additionally having a first coupling element, connected to the valve disk and comprising a receiving means and a drive unit coupled with the first coupling element and is configured to provide the valve disk adjustable from an open position to a closed position. The drive unit and the valve disk are configured to provide a fine control position, wherein the valve disk is tilted relative to the valve seat where ES and ET enclose a defined angle (?), and the seal abuts fully against one of the two sealing surfaces and in part against the other sealing surface.

Abstract: A field unit and ground station may use commercial off-the-shelf (COTS) components and share a common architecture, where differences in functionality are governed by software. The field units and ground stations may be easy to deploy, relatively inexpensive, and be relatively easy to operate. A novel file system may be used where datagrams of a file may be stored across multiple drives and/or devices. The datagrams may be received out of order and reassembled at the receiving device.