Abstract: A device for treating surfaces of substrates utilized in electronics manufacturing includes a resilient skin encasing a porous polymeric interior. The resilient skin overlies the exterior surface of the brush, and is typically characterized by a higher density, a smaller pore size, and a lower porosity than the interior material of the brush. The skin may serve to distribute physical stress over a larger area, protecting raised or recessed brush features from abrasion and wear. The porosity of the skin may also influence the movement of liquids through the brush, ensuring the homogenous dispensing of cleaning fluids. The resilient skin may be formed during or subsequent to a brush fabrication process such as molding, extrusion, or milling, and can be accomplished through the application of heat, chemicals, or radiation.

Abstract: A disposable core structure supports a porous polymeric brush utilized in the treatment of substrates. The disposable core structure includes an exterior surface featuring a plurality of waffle-like recesses separated by walls having sufficient thinness to permit fabrication by injection molding. The core structure includes an end adapted to permit attachment to a rotating member of an associated substrate handling apparatus. The end of the core structure further includes an opening to a bore in fluid communication with pores on the exterior surface of the core structure. Injection molding allows economical mass production of the core structure, permitting it to be fitted with the polymeric brush in a clean room setting and then be permanently fixed to a single brush. This avoids problems of bunching, tearing, wrinkling and stretching associated with replacement of brushes in the field that requires the brush to be fitted around a conventional nondisposable core.