Patents by Inventor Daniel Thevis

Daniel Thevis has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor manufacturing equipment with trace elements for improved defect tracing and methods of manufacture
    Patent number: 9385018
    Abstract: A semiconductor manufacturing equipment comprising trace elements and method of manufacture are disclosed. The semiconductor manufacturing equipment includes one or more components, wherein at least one component is made from an alloy comprising one or more materials and one or more rare earth elements (REEs). The alloy comprises predetermined quantities of the respective REEs. The method for manufacturing a component includes forming an alloy comprising at least one material and one or more selected rare earth elements (REEs) and building the component with the alloy.
    Type: Grant
    Filed: January 7, 2013
    Date of Patent: July 5, 2016
    Assignee: Samsung Austin Semiconductor, L.P.
    Inventors: Dennis Winters, Victor Coots, Matthew Burnham, Daniel Thevis
  • SEMICONDUCTOR MANUFACTURING EQUIPMENT WITH TRACE ELEMENTS FOR IMPROVED DEFECT TRACING AND METHODS OF MANUFACTURE
    Publication number: 20140190278
    Abstract: A semiconductor manufacturing equipment comprising trace elements and method of manufacture are disclosed. The semiconductor manufacturing equipment includes one or more components, wherein at least one component is made from an alloy comprising one or more materials and one or more rare earth elements (REEs). The alloy comprises predetermined quantities of the respective REEs. The method for manufacturing a component includes forming an alloy comprising at least one material and one or more selected rare earth elements (REEs) and building the component with the alloy.
    Type: Application
    Filed: January 7, 2013
    Publication date: July 10, 2014
    Applicant: Samsung Austin Semiconductor
    Inventors: Dennis Winters, Victor Coots, Matthew Burnham, Daniel Thevis