Abstract: A device 10 for sensing a magnetic field gradient using an optically powered resonant integrated microstructure (O-RIMS). The O-RIMS comprises a microbeam 11 having a resonant frequency, a shell 16 supporting the microbeam 11, sensor electronics, a light transporter 36, such as an optical fiber or optical waveguide, in proximity to the shell 16, and a ferromagnetic or magnetically permeable element 26 attached to the shell 16. The ferromagnetic or magnetically permeable element 26 experiences a torque about the fulcrum 24 when a magnetic field gradient is present, and causes a strain on the shell 16. The strain is in turn transmitted to the microbeam 11, thereby affecting its resonant frequency. The change in resonant frequency of the microbeam 11 is conveyed to the sensor electronics via the light transporter 36.

Abstract: A pressure sensor is formed on a substrate, the surface of the substrate having a p-n junction and a shell with a beam inside the shell over the p-n junction. The beam and the shell and the p-n junction surface form optical Fabry-Pérot cavities. An optical fiber is positioned in a hole formed in the underside of the substrate below the p-n junction. Light from the fiber charges the p-n junction and drives it into vibration mode. Pressure changes change the tension in the diaphram to vary the frequency with changes in pressure, so that pressure can be detected.

Abstract: A multi-material resonant thin film beam for a micromechanical sensor having a zero temperature coefficient of frequency (TCF) which is the resonant frequency shift with temperature change. One of the materials may be polysilicon and the other material may be silicon nitride or silicon oxide. Each material has a different thermal coefficient of expansion. The proportion of the various materials is adjusted and the specific geometries are determined so that the TCF is zero. One embodiment is a microbeam composed of two polysilicon thin films with a silicon nitride thin film inserted between the polysilicon films. The thickness of the silicon nitride film may be adjusted to trim the TCF to zero. The film of nitride instead may be placed on one side of a polysilicon film to form a beam. Dual or multiple beam resonators likewise may be made with several materials. The nitride may be placed in the shank areas which join and secure the ends of the beams.

Abstract: A microwheel having stators constructed on a wafer material forming an evacuated. cavity in which a rotor is levitating to lessen friction losses. A plurality of microwheels can be integrated to serve as energy storage and/or momentum control devices.

Abstract: Optical processing apparatus for processing a stream of light. The apparatus includes a light input emitted, for example, by fiber optic cable. Multiple wavelength bands of light are, typically, emitted and transmitted in a direction parallel to an axis. The apparatus also includes a plurality of receptors which are positioned at defined locations spaced from one another. A diffracting member is employed to diffract the wavelength bands of light transmitted parallel to the axis. In one embodiment of the invention, the diffracting member is a controllable diffraction grating. The wavelength bands are selectively diffracted to various of the receptors. The apparatus further includes a controller for selectively adjusting the diffracting member to independently vary a particular receptor to which any one wavelength band is diffracted.

Abstract: A microelectrical mechanical system (MEMS) microthruster array is disclosed. The MEMS microthruster array of the present invention can be used for maintaining inter satellite distance in small satellites. One microthruster array includes numerous microthruster propulsion cells, each having a vacuum enclosed explosive igniter disposed on one side by a breakable diaphragm and having a propellant-filled chamber on the opposite side of the diaphragm. Upon explosion of the explosive igniter, the first diaphragm breaks, which, together with the explosion of the explosive igniter, causes the propellant to expand rapidly, thereby providing exhaust gases which are ejected from an exterior face of the microthruster propulsion array, thereby providing a small unit of thrust.

Abstract: A micromechanical switch and a method for operating the micromechanical switch between an open position and a closed position by moving a magnet between two positions. The magnet produces a magnetic flux that travels through a magnetically conductive layer. The magnetic flux within the magnetically conductive layer forcibly draws a contact element into contact with an electrically conductive layer and electrically shorts the open electrical contacts.

Abstract: A monolithic, bi-directional micro device formed on a support base, for example a silicon wafer, including at least one input and output flow channels for flow of fluid. The actuator portion includes electrically conducting upper lower diaphragms (preferably formed from doped polycrystalline silicon) formed about a central electrode and mounted on the base. The diaphragms move under electrostatic force between first and second positions upon application of voltage. The upper and lower diaphragms form a sealed, enclosed cavity separated from the channels. The diaphragms are connected for mechanically transmitting electrostatically induced force from one diaphragm to the other, preferably by one or more posts passing through at least one hole formed in the central electrode. The lower diaphragm and the support base are maintained at the same electrical potential. The device is formed by depositing and patterning the electrodes and forming spaces between the electrodes by etching of sacrificial layers.

Abstract: A micromechanical switch and a method for operating the micromechanical switch between an open position and a closed position by moving a magnet between two positions. The magnet produces a magnetic flux that travels through one of two different conductive layers. The magnetic flux within the conductive layer forcibly draws a contact element into contact with the conductive layer and electrically shorts the conductive layer. Depending upon which conductive layer is shorted, the micromechanical switch is set in either the open position or the closed position.

Abstract: A very high temperature microbeam sensor of a resonant integrated microstructure having an electrostatic beam driver and an optical fiber pick-up for sensed light from the beam. The high temperature sensor has no components that are vulnerable to temperatures up to 600 degrees C. Associated components for detection, processing and driving are remote from the sensor environment. By using different materials in the beam assembly, such as tungsten for the beam, and sapphire for the substrate and the shell, the sensor can withstand temperatures up to 1000 degrees C. Also, optical fiber may be used for long distance connections between processing electronics and the driver in the sensing device, by locating a photo detector just outside the very or ultra high temperature sensing environment, and then using optical fiber for sending long distance signals from the processor to the driver photo detector, for eliminating electrical signal-to-noise problems.

Abstract: An apparatus and method for prevention of migration of mobile ions in a gyroscope. A dielectric barrier material layer is placed between a gyroscope body and one or more gyroscope components. The dielectric barrier material layer reduces the electric field formed in the gyroscope block, and thus reduces ion migration therein. The material may prevent mobile ions from reaching the cathode seal.

Abstract: A relay device build using MEMS technology and having a semiconductor wafer base with a surface depression having a first electrically conductive surface pattern. A lower diaphragm is moveably positioned above the depression for contact and has a second electrically conductive surface pattern thereon. An upper diaphragm is positioned above the lower diaphragm, with a central electrode mounted between them to selectively attract and move a diaphragm upon application of voltage. A post connects the upper and lower diaphragms to move a diaphragm when the other is moved electrostatically. The diaphragms define a sealed region enclosing the central electrode. The surface patterns may be tapered at their perimiters to provide a contact contour allowing gradually increasing contact as the diaphragm moves toward the surface. The preferred wafer is a silicon wafer, and the diaphragms are polysilicon.

Abstract: A process for contouring a via formed in a dielectrics whereby a layer of a refractory metal is formed on the dielectric and in the via. The refractory metal layer is removed until a surface of the refractory metal within the via is below the upper surface of the dielectric. An etching process removes a portion of the dielectric and a tapered shape is formed at the intersection of the via and the upper surface of the dielectric. A second layer of metal is formed over the dielectric, with the second layer of metal extending into the vias and contacting the refractory metal with the tapered shape providing improved step coverage of the second layer of metal at the via.

Abstract: A fixture which includes a lower base for supporting and protecting the front surface of a semiconductor wafer and a clamp. The lower base has an upper end having a central surface portion recessed from a peripheral surface portion for supporting by means of an O ring the peripheral portion of the front surface of the wafer. The clamp rests on a peripheral portion of the back surface of the wafer with the remaining back surface exposed to the backside etching process. A pin and hole arrangement help align the clamp to the base. Holes in the base equalize pressure on both sides of the wafer.

Abstract: A low temperature vacuum distillation apparatus. The distillation apparatus includes an evaporation section and a condensation section. Fluid flow throughout the system is assisted by an appropriate pump, and heat exchangers, one in each of the evaporation and condensation sections, are interconnected by employment of a heat pump.The condensation section includes a condensation chamber downward from which bubble tubes extend into a collection chamber. Collection chamber is provided with a pump to effect transfer of distillate having volatile impurities entrained therein to a final collection vessel. A pump communicates with vessel to create a partial vacuum therein to ensure venting of the impurities.

Abstract: The present invention provides a method of protecting semiconductor integrated circuit from mobile ion contamination. In one embodiment a gettering agent is implanted into a dielectric layer. In an alternative embodiment a gettering agent is implanted into a photoresist layer which is ashed in an oxygen based plasma, leaving the gettering agent on the surface underlying the photoresist.

Abstract: A method of etching a thin film containing chromium using fluorine or a fluorine containing compound without leaving an electrically conductive residue is described.