Patents by Inventor Daniela Beardo

Daniela Beardo has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Reduced-beak planox process for the formation of integrated electronic components
    Patent number: 4897365
    Abstract: A method for reducing birdbeaks formed during a planox process is disclosed. On a silicon substrate (1), oxide (2) and nitride (3) are formed. The oxide and nitride are then selectively etched using a single plasma having high selectivity with respect to silicon and a photoresist mask (4). The high selectivity toward silicon is achieved by use of a CHF.sub.3 +CO.sub.2 plasma under conditions of 30:1 oxide/silicon selectivity. Field oxide regions (5) with reduced birdbeaks can then be formed.
    Type: Grant
    Filed: November 23, 1987
    Date of Patent: January 30, 1990
    Assignee: SGS Microelecttronica S.P.A.
    Inventors: Livio Baldi, Daniela Beardo, Marco Icardi, Adriana Rebora