Abstract: A method of performing screen printing on a substrate used for the manufacture of a solar cell is provided. The method includes moving a print head over a screen by a first drive actuator to perform a printing stroke in a first direction. The method includes moving a material processing head in the first direction by a second drive actuator to perform a material processing stroke behind the print head. The print head is moved away from the material processing head by the first drive actuator during a distance increasing phase of the printing stroke to increase a separation distance between the print head and the material processing head.

Abstract: A support device (10) includes a substrate receiving region. The support device (10) includes a support body (110) shaped as a pattern having an array of openings (130). The support body (110) is a sparse structure wherein a joint area of the openings of the array of openings (130) is 40% or more of the area of the substrate receiving region. The support body (110) includes one or more suction openings (140) configured to be in fluid communication with a vacuum source arrangement.

Abstract: Embodiments of the present invention provide an apparatus and method for processing substrates using a multiple screen printing chamber processing system that has an increased system throughput, improved system uptime, and improved device yield performance, while maintaining a repeatable and accurate screen printing process on the processed substrates. In one embodiment, the multiple screen printing chamber processing system is adapted to perform a screen printing process within a portion of a crystalline silicon solar cell production line in which a substrate is patterned with a desired material, and then processed in one or more subsequent processing chambers.

Abstract: Embodiments of the present invention provide an apparatus and method for processing substrates using a multiple screen printing chamber processing system that has an increased system throughput, improved system uptime, and improved device yield performance, while maintaining a repeatable and accurate screen printing process on the processed substrates. In one embodiment, the multiple screen printing chamber processing system is adapted to perform a screen printing process within a portion of a crystalline silicon solar cell production line in which a substrate is patterned with a desired material, and then processed in one or more subsequent processing chambers.