Abstract: An apparatus and method for creating a MEMS directional sensor system capable of determining direction from at least two microphones to a sound source over a wide range of frequencies is disclosed. By utilizing a stiff beam stand-off architecture that relies on a unique manufacturing technique in a MEMS device, such as described herein, a very small set of microphones, on the order of a few micrometers, can be designed with unsurpassed ability to detect a sound source location.

Abstract: An apparatus and method for creating a MEMS directional sensor system capable of determining direction from at least two microphones to a sound source over a wide range of frequencies is disclosed. By utilizing a stiff beam stand-off architecture that relies on a unique manufacturing technique in a MEMS device, such as described herein, a very small set of microphones, on the order of a few micrometers, can be designed with unsurpassed ability to detect a sound source location.

Abstract: A rotational actuator includes a plurality of actuation beams each having an offset longitudinal axis with respect to one another; and a coupler connecting the plurality of actuation beams to one another, wherein the coupler is connected to each individual actuation beam at a position where connection of the coupler to other actuation beams causes the longitudinal axis of each actuation beam to be offset with respect to one another, wherein the plurality of actuation beams are lengthened or shortened to cause a moment about the coupler causing rotation of a point in the rotational actuator. The rotational actuator includes an amplification beam connected to the coupler such that the longitudinal axis of the amplification beam is substantially perpendicular to the longitudinal axes of the plurality of actuation beams. Additionally, the rotational actuator includes a resistant spring member connected to the amplification beam. The actuation beams can be thermally or piezoelectrically induced.