Patents by Inventor Danny Phillips

Danny Phillips has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Forming an antireflective coating for VLSI metallization
    Patent number: 4839010
    Abstract: Method of forming an antireflective coating on a face of a semiconductor which includes forming a metal oxide layer on the face, heating the oxide layer to a temperature sufficiently high to cause the migration of free metal atoms over the surface of the metal oxide and then sputtering a thin layer of aluminum or aluminum alloy on the oxide layer of a thickness such that bumps are formed which reduce the specularity of the surface. The aluminum atoms form bumps which reduce the specularity of the surface.
    Type: Grant
    Filed: November 6, 1986
    Date of Patent: June 13, 1989
    Assignee: Texas Instruments Incorporated
    Inventors: Cloves R. Cleavelin, Danny Phillips