Patents by Inventor Daphna Peimer

Daphna Peimer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METROLOGY TECHNIQUE FOR SEMICONDUCTOR DEVICES
    Publication number: 20240271926
    Abstract: A method for semiconductor device metrology. The method may include creating a time-domain representation of wavelength-domain measurement data of light reflected by a three dimensional (3D) patterned structure of a semiconductor device; selecting one or more relevant peaks of the time-domain representation and at least one irrelevant portion of the time-domain representation. One or more relevant peaks occur during one or more relevant time periods; and are associated with corresponding relevant reference peaks that are associated with different versions of a reference 3D patterned structure.
    Type: Application
    Filed: June 3, 2022
    Publication date: August 15, 2024
    Applicant: NOVA LTD.
    Inventors: Dror SHAFIR, Zvi Gorohovsky, Jacob Ofek, Daphna Peimer, Tal Heilpern, Dana Szafranek, Gilad BARAK, Smadar Ferber
  • TIME-DOMAIN OPTICAL METROLOGY AND INSPECTION OF SEMICONDUCTOR DEVICES
    Publication number: 20240085805
    Abstract: A semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting a relevant and irrelevant portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the relevant portion of the time-domain representation.
    Type: Application
    Filed: January 28, 2022
    Publication date: March 14, 2024
    Applicant: NOVA LTD.
    Inventors: Gilad BARAK, Amir Sagiv, Yishai Schreiber, Jacob Ofek, Zvi Gorohovsky, Daphna Peimer