Patents by Inventor Daphna Peimer

Daphna Peimer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Time-domain optical metrology and inspection of semiconductor devices
    Patent number: 12680964
    Abstract: A semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting a relevant and irrelevant portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the relevant portion of the time-domain representation.
    Type: Grant
    Filed: January 28, 2022
    Date of Patent: July 14, 2026
    Assignee: NOVA LTD.
    Inventors: Gilad Barak, Amir Sagiv, Yishai Schreiber, Jacob Ofek, Zvi Gorohovsky, Daphna Peimer
  • SYSTEM AND METHOD FOR LIBRARY CONSTRUCTION AND USE IN MEASUREMENTS ON PATTERNED STRUCTURES
    Publication number: 20260072359
    Abstract: A computer system is presented configured and operable as a library constructor for use in extracting one or more parameters of a patterned structure from real time measured data obtained on said structure. The system comprises: data input utility for receiving input data comprising preliminary measured data obtained from at least a part of a structure, and comprising data indicative of user-defined quality of measurement results (QOR); and a data processor.
    Type: Application
    Filed: December 14, 2022
    Publication date: March 12, 2026
    Applicant: NOVA LTD.
    Inventors: Zvi Gorohovsky, Daphna Peimer, Amit GODEL, Jacob Ofek, Yotam CAMUS, Lilach TAMAM
  • METROLOGY TECHNIQUE FOR SEMICONDUCTOR DEVICES
    Publication number: 20240271926
    Abstract: A method for semiconductor device metrology. The method may include creating a time-domain representation of wavelength-domain measurement data of light reflected by a three dimensional (3D) patterned structure of a semiconductor device; selecting one or more relevant peaks of the time-domain representation and at least one irrelevant portion of the time-domain representation. One or more relevant peaks occur during one or more relevant time periods; and are associated with corresponding relevant reference peaks that are associated with different versions of a reference 3D patterned structure.
    Type: Application
    Filed: June 3, 2022
    Publication date: August 15, 2024
    Applicant: NOVA LTD.
    Inventors: Dror SHAFIR, Zvi Gorohovsky, Jacob Ofek, Daphna Peimer, Tal Heilpern, Dana Szafranek, Gilad BARAK, Smadar Ferber
  • TIME-DOMAIN OPTICAL METROLOGY AND INSPECTION OF SEMICONDUCTOR DEVICES
    Publication number: 20240085805
    Abstract: A semiconductor device metrology including creating a time-domain representation of wavelength-domain measurement data of light reflected by a patterned structure of a semiconductor device, selecting a relevant and irrelevant portion of the time-domain representation, and determining one or more measurements of one or more parameters of interest of the patterned structure by performing model-based processing using the relevant portion of the time-domain representation.
    Type: Application
    Filed: January 28, 2022
    Publication date: March 14, 2024
    Applicant: NOVA LTD.
    Inventors: Gilad BARAK, Amir Sagiv, Yishai Schreiber, Jacob Ofek, Zvi Gorohovsky, Daphna Peimer