Patents by Inventor Darren Alman

Darren Alman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Submicron particle removal
    Patent number: 7528386
    Abstract: A system for non-contact cleaning of particulate contamination of surfaces includes one or more sources that create a charge imbalance between a surface and particles that contaminate the surface, and a power supply that creates a pulsed electrical bias on the surface. This imbalance produces an electrostatic force that propels the particles off the surface. The cleaning process can be associated, for example, with microelectronic lithography and manufacturing.
    Type: Grant
    Filed: December 5, 2005
    Date of Patent: May 5, 2009
    Assignee: Board of Trustees of University of Illinois
    Inventors: David N. Ruzic, Brian E. Jurczyk, Darren Alman, Martin J. Neumann, Huatan Qiu
  • Submicron particle removal
    Publication number: 20060237667
    Abstract: A system for non-contact cleaning of particulate contamination of surfaces includes one or more sources that create a charge imbalance between a surface and particles that contaminate the surface, and a power supply that creates a pulsed electrical bias on the surface. This imbalance produces an electrostatic force that propels the particles off the surface. The cleaning process can be associated, for example, with microelectronic lithography and manufacturing.
    Type: Application
    Filed: December 5, 2005
    Publication date: October 26, 2006
    Inventors: David Ruzic, Brian Jurczyk, Darren Alman, Martin Neumann, Huatan Qiu