Abstract: Apparatus and methods of calibrating a microfluidic flow sensor, in which the flow of a fluid through a flow sensor is stopped and a first value is read from the flow sensor, then the fluid is pumped through the flow sensor sequentially at first and second selected rates, and readings from the flow sensor of the flow rate are taken for each of the rates. The readings are used in a polynomial equation to determine the actual flow rate, which is used to calibrate the sensor. The flow sensor can be connected to a computer programmed to perform the calibration method, determine the actual flow rate of the sensor, and make appropriate adjustments to the flow rate of a pump.

Abstract: A microfluidic rotary valve and methods of manufacturing same are disclosed. The rotary valve includes a stator chip having at least one inlet and at least one outlet. The rotary valve also includes a rotor having at least one rotor channel in sealed engagement with the stator chip. The rotor rotates between valve positions preventing and allowing fluid communication between the inlets and outlets by way of the rotor channels and according to the design of the inlets, outlets and rotor channels. The stator chip includes a first planar substrate having a contact face and a second planar substrate having a contact face bonded to the contact face of the first planar substrate. The first planar substrate defines a first portion of the inlet and outlet, and the second planar substrate defines a second portion of the inlet and outlet.