Patents by Inventor Darren L. Moore

Darren L. Moore has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processes for curing silicon based low-k dielectric materials
    Patent number: 8338315
    Abstract: Processes for curing silicon based low k dielectric materials generally includes exposing the silicon based low k dielectric material to ultraviolet radiation in an inert atmosphere having an oxidant in an amount of about 10 to about 500 parts per million for a period of time and intensity effective to cure the silicon based low k dielectric material so to change a selected one of chemical, physical, mechanical, and electrical properties and combinations thereof relative to the silicon based low k dielectric material prior to the ultraviolet radiation exposure. Also disclosed herein are silicon base low k dielectric materials substantially free of sub-oxidized SiO species.
    Type: Grant
    Filed: February 26, 2008
    Date of Patent: December 25, 2012
    Assignee: Axcelis Technologies, Inc.
    Inventors: Darren L. Moore, Carlo Waldfried, Ganesh Rajagopalan
  • PROCESSES FOR CURING SILICON BASED LOW-K DIELECTRIC MATERIALS
    Publication number: 20090215282
    Abstract: Processes for curing silicon based low k dielectric materials generally includes exposing the exposing the silicon based low k dielectric material to ultraviolet radiation in an inert atmosphere having an oxidant in an amount of about 10 to about 500 parts per million for a period of time and intensity effective to cure the silicon based low k dielectric material so to change a selected one of chemical, physical, mechanical, and electrical properties and combinations thereof relative to the silicon based low k dielectric material prior to the ultraviolet radiation exposure. Also disclosed herein are silicon base low k dielectric materials substantially free of sub-oxidized SiO species.
    Type: Application
    Filed: February 26, 2008
    Publication date: August 27, 2009
    Applicant: AXCELIS TECHNOLOGIES, INC.
    Inventors: Darren L. Moore, Carlo Waldfried, Ganesh Rajagopalan