Patents by Inventor Darren Southworth

Darren Southworth has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method for coating a substrate and also a coating system
    Patent number: 10596592
    Abstract: Method for coating a substrate with a coating material is described, in particular with a coating or photoresist, wherein said substrate is provided in said method. Said coating material is applied to said upper side of said substrate. A gas flow is generated, said gas flow being directed from said underside of said substrate to said upper side of said substrate, wherein said gas flow prevents a bead of said coating material forming on said edge of said upper side of said substrate or a previously existing bead is removed by means of said gas flow. In addition, a coating system is described.
    Type: Grant
    Filed: June 23, 2017
    Date of Patent: March 24, 2020
    Assignee: SUSS MICROTEC LITHOGRAPHY GMBH
    Inventors: Darren Southworth, Omar Fakhr
  • Method for coating a substrate and also a coating system
    Publication number: 20170368567
    Abstract: Method for coating a substrate with a coating material is described, in particular with a coating or photoresist, wherein said substrate is provided in said method. Said coating material is applied to said upper side of said substrate. A gas flow is generated, said gas flow being directed from said underside of said substrate to said upper side of said substrate, wherein said gas flow prevents a bead of said coating material forming on said edge of said upper side of said substrate or a previously existing bead is removed by means of said gas flow. In addition, a coating system is described.
    Type: Application
    Filed: June 23, 2017
    Publication date: December 28, 2017
    Inventors: Darren Southworth, Omar Fakhr