Patents by Inventor Darryl S. Byle

Darryl S. Byle has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor processing system with wafer container docking and loading station
    Patent number: 6960257
    Abstract: A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.
    Type: Grant
    Filed: May 7, 2003
    Date of Patent: November 1, 2005
    Assignee: Semitool, Inc.
    Inventors: Raymon F. Thompson, Robert W. Berner, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright, Darryl S. Byle
  • Semiconductor processing system with wafer container docking and loading station
    Publication number: 20030202871
    Abstract: A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.
    Type: Application
    Filed: May 7, 2003
    Publication date: October 30, 2003
    Inventors: Raymon F. Thompson, Robert W. Berner, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright, Darryl S. Byle
  • Semiconductor processing system with wafer container docking and loading station
    Patent number: 5836736
    Abstract: A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.
    Type: Grant
    Filed: August 15, 1996
    Date of Patent: November 17, 1998
    Assignee: Semitool, Inc.
    Inventors: Raymon F. Thompson, Robert W. Berner, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright, Darryl S. Byle
  • Apparatus for controlling a cable on a take-up drum
    Patent number: 5669575
    Abstract: Apparatus that controls its cable on its cable take-up drum, the apparatus ncluding pressure rollers supported by flexible spring steel members, a flexible spring steel member around each end of the cable take-up drum, two ends of each flexible member being pulled together by a pair of adjustable links, the pressure rollers applying pressure on the cable as the cable is being wound on to or off of the cable take-up drum.
    Type: Grant
    Filed: November 29, 1995
    Date of Patent: September 23, 1997
    Assignee: The United States of America as represented by the Secretary of the Navy
    Inventor: Darryl S. Byle
  • Semiconductor processing system with wafer container docking and loading station
    Patent number: 5660517
    Abstract: A processor for processing integrated circuit wafers, semiconductor substrates, data disks and similar units requiring very low contamination levels. The processor has an interface section which receives wafers in standard wafer carriers. The interface section transfers the wafers from carriers onto novel trays for improved processing. The interface unit can hold multiple groups of multiple trays. A conveyor having an automated arm assembly moves wafers supported on a tray. The conveyor moves the trays from the interface along a track to several processing stations. The processing stations are accessed from an enclosed area adjoining the interface section.
    Type: Grant
    Filed: March 31, 1995
    Date of Patent: August 26, 1997
    Assignee: Semitool, Inc.
    Inventors: Raymon F. Thompson, Robert W. Berner, Gary L. Curtis, Stephen P. Culliton, Blaine G. Wright, Darryl S. Byle, John M. Pedersen