Patents by Inventor Dave Broyer

Dave Broyer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Sliding wafer release gripper/wafer peeling gripper
    Patent number: 7751172
    Abstract: The present invention is directed to a system and a method for peeling a wafer off of an electrostatic clamp (ESC). The ESC removal system comprises a electrostatic clamp and a wafer electrically coupled and physically in contact with each other. A plurality of grippers or pins are arranged with respect to the wafer and the ESC to allow the wafer to be peeled off or removed section by section from the electrostatic clamp. The system and method allow the wafer to be removed with a much lower pull force than current systems and methods.
    Type: Grant
    Filed: October 18, 2006
    Date of Patent: July 6, 2010
    Assignee: Axcelis Technologies, Inc.
    Inventors: Ashwin M. Purohit, Dale Stone, Dave Broyer, Steve Drummond
  • Sliding wafer release gripper / wafer peeling gripper
    Publication number: 20080100983
    Abstract: The present invention is directed to a system and a method for peeling a wafer off of an electrostatic clamp (ESC). The ESC removal system comprises a electrostatic clamp and a wafer electrically coupled and physically in contact with each other. A plurality of grippers or pins are arranged with respect to the wafer and the ESC to allow the wafer to be peeled off or removed section by section from the electrostatic clamp. The system and method allow the wafer to be removed with a much lower pull force than current systems and methods.
    Type: Application
    Filed: October 18, 2006
    Publication date: May 1, 2008
    Inventors: Ashwin M. Purohit, Dale Stone, Dave Broyer, Steve Drummond