Patents by Inventor Dave Monahan

Dave Monahan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Plasma etching of refractory metals and their silicides
    Patent number: 4659426
    Abstract: Refractory metals, refractory metal silicide, and polysilicon/refractory metal silicide sandwich structures integrated circuits are etched using carbonyl chemistry. That is, the deposited material is plasma etched using an etchant gas mixture which contains a gas, such as CO2, which can dissociate to provide carbonyl groups (CO) or, in combination with halogen sources, carbonyl halide radicals.
    Type: Grant
    Filed: May 3, 1985
    Date of Patent: April 21, 1987
    Assignee: Texas Instruments Incorporated
    Inventors: Clyde R. Fuller, Gordon P. Pollack, Robert H. Eklund, Dave Monahan