Patents by Inventor Dave Shafer

Dave Shafer has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Projection optical system and method
    Patent number: 7301707
    Abstract: A refractive projection optical system for imaging a first object into a region of a second object comprises a plurality of lenses disposed along an imaging beam path of the projection optical system; wherein the projection optical system is configured to have a numerical aperture on a side of the second object of greater than 1 wherein the projection optical system is configured to generate an intermediate image of the first object and to image the intermediate image into the region of the second object, wherein the intermediate image is formed in between, the first and second objects.
    Type: Grant
    Filed: September 1, 2005
    Date of Patent: November 27, 2007
    Assignee: Carl Zeiss SMT AG
    Inventors: Dave Shafer, Susanne Beder
  • Projection optical system and method
    Publication number: 20060056064
    Abstract: A refractive projection optical system for imaging a first object into a region of a second object comprises a plurality of lenses disposed along an imaging beam path of the projection optical system; wherein the projection optical system is configured to have a numerical aperture on a side of the second object of greater than 1 wherein the projection optical system is configured to generate an intermediate image of the first object and to image the intermediate image into the region of the second object, wherein the intermediate image is formed in between, the first and second objects.
    Type: Application
    Filed: September 1, 2005
    Publication date: March 16, 2006
    Applicant: Carl Zeiss SMT AG
    Inventors: Dave Shafer, Susanne Beder