Patents by Inventor David A. Korn

David A. Korn has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Oxide etch and method of etching
    Patent number: 6063712
    Abstract: An oxide etchant and method of etching are provided. The etchant includes at least one fluorine-containing compound and at least one auxiliary component selected from the group of a boron-containing compound and a phosphorus-containing compound.
    Type: Grant
    Filed: November 25, 1997
    Date of Patent: May 16, 2000
    Assignee: Micron Technology, Inc.
    Inventors: Terry L. Gilton, David A. Korn