Abstract: The present invention provides a system (100) for conditioning multi-component slurries utilized in chemical mechanical polishing (CMP) of semiconductor wafers (140). The system provides a first slurry component (108), and a second slurry component (120). A conditioning component (102) has first and second inlets, and an outlet operatively coupled to a dispensing system (138). First and second flow control components (116, 126) are operably intercoupled between the first and second inlets and the first and second slurry components, respectively. The system further provides a megasonic energy source (106), adapted to generate an energy field (118) across the conditioning component. A conveyance component (114) conducts the slurry components from the inlets through the energy field, and delivers a final mixture (136) of multi-component slurry to the outlet.

Abstract: According to one embodiment of the invention, a chemical mechanical polishing system includes a platen having a first surface adapted to couple a polishing pad thereto. The first surface includes a generally circular center portion and an annular portion surrounding the generally circular center portion. The generally circular center portion encloses an area and has an attachment surface area that is less than the area enclosed by the generally circular center portion. The attachment surface area is adapted to couple an inner portion of the polishing pad to the platen. According to one embodiment of the invention, a chemical mechanical polishing system includes a platen having a first surface coupling a polishing pad thereto. The first surface includes a generally circular center portion and an annular portion surrounding the generally circular center portion.

Abstract: A generator housing including a housing module having at least one relatively complex internal passage formed therein and housing flow control components for circulating a fluid coolant through the generator. The housing module is formed by forming a plurality of sub-components each having at least one relatively simple passage formed therein for defining part of the at least one relatively complex internal passage. The sub-components are combined together as by bonding to form the housing module with at least one relatively complex internal passage. The flow control components are contained in bores within the housing module in fluid communication with the relatively complex internal passage therein. The housing module if formed of a relatively lightweight, non-metallic material to enable reduction in the weight of the generator housing in cost-effective and technically accepted manner thereby providing an improved generator which can be used in aircraft.

Abstract: A credit card imprinter authorization terminal (20) including an imprinter device (24), keyboard (26), a display (28), a credit card reader (30), and a printer (32) all contained on a single housing structure (22). The credit card authorization terminal (20) includes a microprocessor (36) and its associated memory (38) for controlling operation of the credit card authorization terminal. The printer (32) provides an automatic printout of credit card transaction related information providing an audit trail for future reference.