Patents by Inventor David Alan Meatyard

David Alan Meatyard has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of making small geometry features
    Patent number: 7935604
    Abstract: A method of forming a small geometry feature. The method includes forming a source layer on a top surface of a substrate; forming a mandrel on a top surface of the source layer, the mandrel having a sidewall; sputtering material from the source layer onto the sidewall of the mandrel to form a sidewall layer on the sidewall of the mandrel; and removing the mandrel. Also methods to forming wires and field effect transistors of integrated circuits.
    Type: Grant
    Filed: February 11, 2008
    Date of Patent: May 3, 2011
    Assignee: International Business Machines Corporation
    Inventors: James William Adkisson, Jeffrey Peter Gambino, Robert Kenneth Leidy, Walter Victor Lepuschenko, David Alan Meatyard, Stephen A. Mongeon, Richard John Rassel
  • METHOD OF MAKING SMALL GEOMETRY FEATURES
    Publication number: 20100279480
    Abstract: A method of forming a small geometry feature. The method includes forming a source layer on a top surface of a substrate; forming a mandrel on a top surface of the source layer, the mandrel having a sidewall; sputtering material from the source layer onto the sidewall of the mandrel to form a sidewall layer on the sidewall of the mandrel; and removing the mandrel. Also methods to forming wires and field effect transistors of integrated circuits.
    Type: Application
    Filed: February 11, 2008
    Publication date: November 4, 2010
    Inventors: James William Adkisson, James Peter Gambino, Robert Kenneth Leidy, Walter Victor Lepuschenko, David Alan Meatyard, Stephen A. Mongeon, Richard John Rassel