Patents by Inventor David AMBESI

David AMBESI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF DESIGNING LITHOGRAPHY FEATURES BY SELF-ASSEMBLY OF BLOCK COPOLYMER
    Publication number: 20160178999
    Abstract: A method of design or verification for a self-assemblable block copolymer feature, the block copolymer feature including a first domain having a first polymer type and a second domain having a second polymer type, the method including, based on the length of the second polymer type or on an uncertainty in position of the first domain within the block copolymer feature calculated based on the length of the second polymer type, adjusting a parameter of the self-assembly process of a block copolymer feature or verifying a placement of a block copolymer feature.
    Type: Application
    Filed: July 9, 2014
    Publication date: June 23, 2016
    Applicant: ASML Netherlands B.V.
    Inventors: Sander Frederik WUISTER, Bart LAENENS, David AMBESI