Patents by Inventor David Aspnes

David Aspnes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Normal incidence rotating compensator ellipsometer
    Publication number: 20070091311
    Abstract: A normal incidence rotating compensator ellipsometer includes an illumination source that produces a broadband probe beam. The probe beam is redirected by a beam splitter to be normally incident on a sample under test. Before reaching the sample, the probe beam is passed through a rotating compensator. The probe beam is reflected by the sample and passes through the rotating compensator a second time before reaching a detector. The detector converts the reflected probe beam into equivalent signals for analysis.
    Type: Application
    Filed: December 13, 2006
    Publication date: April 26, 2007
    Inventor: David Aspnes
  • Normal incidence rotating compensator ellipsometer
    Publication number: 20050248763
    Abstract: A normal incidence rotating compensator ellipsometer includes an illumination source that produces a broadband probe beam. The probe beam is redirected by a beam splitter to be normally incident on a sample under test. Before reaching the sample, the probe beam is passed through a rotating compensator. The probe beam is reflected by the sample and passes through the rotating compensator a second time before reaching a detector. The detector converts the reflected probe beam into equivalent signals for analysis.
    Type: Application
    Filed: May 6, 2004
    Publication date: November 10, 2005
    Inventor: David Aspnes