Abstract: The fabrication of small-scale structures is disclosed. A unit-cell of a small-scale structure with non-planar features is fabricated by forming a membrane on a suitable material. A pattern is formed in the membrane and a portion of the substrate underneath the membrane is removed to form a cavity. Resonators are then directionally deposited on the wall or sides of the cavity. The cavity may be rotated during deposition to form closed-loop resonators. The resonators may be non-planar. The unit-cells can be formed in a layer that includes an array of unit-cells.

Abstract: According to various embodiments, the present teachings relate to Generalized Transverse Bragg Waveguides (GTBW) that can include an a dielectric core having an index of refraction n1 and an optical axis. The optical waveguide can further include a media having an index of refraction n2 bounding a top surface and a bottom surface of the dielectric core, wherein n2<n1. The optical waveguide can also include a first dielectric cladding bounding a first side of the dielectric core, wherein the first dielectric cladding has a first periodic spatially varying index of refraction, and a second dielectric cladding bounding a second side of the dielectric core, wherein the second dielectric cladding has a second periodic spatially varying index of refraction. The direction of the first periodic spatially varying index of refraction and the direction of the second periodic spatially varying index of refraction can be at an angle other than normal or parallel to the optical axis.

Abstract: A displacement measuring method and device is disclosed in which speckle amplitude interferometry within a single speckle feature or a small number of features of a speckle pattern is used to achieve sub-fringe accuracy with a single detector and to measure displacement of the object under investigation with sub-wavelength accuracy at measurement speeds consistent with real-time control of manufacturing processes. The same technique applied to multiple spots on a sample with optical means for causing interference between different combinations of scattered fields, including fields from different illuminated spots, permits measurements of the total sample motion.