Abstract: Embodiments of the present disclosure generally relate to a substrate support having a surface coating which reduces defect formation and back side metal contamination during substrate processing. A support body includes a body having an outer surface and a surface coating formed from a non-metal or a reduced-metal material disposed over at least a top surface of the outer surface of the body. In an embodiment, the surface coating includes a two-part coating having an optional first coating layer formed over an entire outer surface of the support body.

Abstract: A diaphragm pump such as a three-chamber diaphragm pump includes a head having an inlet port and an outlet port and defining an inlet side including inlet chambers; and an outlet side having a center outlet chamber. Each of the inlet chambers includes an associated inlet valve. A single shutoff valve controlling fluid flow to the center outlet chamber and a single bypass valve in fluid communication between the center outlet chamber and the inlet side. The single shutoff valve has a plunger with an oval cross-section extending into the center outlet chamber. The single shutoff valve and the single bypass valve have adjustable pressure set points that are adjustable independently of one another.

Abstract: A dynamically controlled scalable lighting system comprising a controller unit that receives network messages using known protocols from external show or lighting control systems and other external inputs and data streams. A base station connected to the controller unit using long-distance communication protocol network messages, where the base station also provides power, from at least one power source, to activate all light sprites. A link unit connected to the base station and light sprites to activate all light sprites attached to each link unit, wherein the light sprites are encapsulated in a custom molded enclosure that are sealed from the elements, and are individually controllable and dynamically respond to external inputs in real time.

Abstract: A pump includes a pump head and a motor assembly including a motor. The motor engages the pump head and actuates the pump head. The pump includes a hand actuatable quick disconnect assembly coupling the pump head to the motor assembly without the need for tools. A pump monitoring system acquires data and information to detect problems and provide information for pump maintenance.

Abstract: A diaphragm pump such as a three-chamber diaphragm pump includes a head having an inlet port and an outlet port and defining an inlet side including inlet chambers; and an outlet side having a center outlet chamber. Each of the inlet chambers includes an associated inlet valve. A single shutoff valve controlling fluid flow to the center outlet chamber and a single bypass valve in fluid communication between the center outlet chamber and the inlet side. The single shutoff valve has a plunger with an oval cross-section extending into the center outlet chamber. The single shutoff valve and the single bypass valve have adjustable pressure set points that are adjustable independently of one another.