Patents by Inventor David Beginski

David Beginski has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • WAFER EDGE WITH LIGHT SENSOR
    Publication number: 20070242281
    Abstract: An apparatus for detecting the presence of a substrate that is carried by an end effector of a substrate handling assembly positioned within a substrate processing system comprises a receiving member that is coupled to an end effector and a light sensor that is operatively coupled to the receiving member and is configured to detect an amount light transmitted by the receiving member. In a modified embodiment, the apparatus also includes a transmitting member that receives light from a light source and is also coupled to the end effector.
    Type: Application
    Filed: June 25, 2007
    Publication date: October 18, 2007
    Applicant: ASM America, Inc.
    Inventors: David Beginski, Richard Crabb, James Donald
  • Wafer edge with light sensor
    Patent number: 7235806
    Abstract: An apparatus for detecting the presence of a substrate that is carried by an end effector of a substrate handling assembly positioned within a substrate processing system comprises a receiving member that is coupled to an end effector and a light sensor that is operatively coupled to the receiving member and is configured to detect an amount light transmitted by the receiving member. In a modified embodiment, the apparatus also includes a transmitting member that receives light from a light source and is also coupled to the end effector.
    Type: Grant
    Filed: May 16, 2003
    Date of Patent: June 26, 2007
    Assignee: ASM America, Inc.
    Inventors: David A. Beginski, Richard Crabb, James Donald
  • Sensor signal transmission from processing system
    Publication number: 20050155708
    Abstract: A processing system includes a plurality of chamber walls that define a sealed environment. A sensor is positioned in the sealed environment. In one embodiment, a power source, such as a photoelectric cell, is positioned within the environment. In another embodiment, a wireless transmission device is positioned within the sealed environment. Methods for monitoring the conditions within the sealed environment are also disclosed.
    Type: Application
    Filed: October 14, 2004
    Publication date: July 21, 2005
    Inventor: David Beginski
  • Sensor signal transmission from processing system
    Patent number: 6823753
    Abstract: A processing system includes a plurality of chamber walls that define a sealed environment. A sensor is positioned in the sealed environment. In one embodiment, a power source, such as a photoelectric cell, is positioned within the environment. In another embodiment, a wireless transmission device is positioned within the sealed environment. Methods for monitoring the conditions within the sealed environment are also disclosed.
    Type: Grant
    Filed: May 16, 2003
    Date of Patent: November 30, 2004
    Assignee: ASM America, Inc.
    Inventor: David A. Beginski
  • SENSOR SIGNAL TRANSMISSION FROM PROCESSING SYSTEM
    Publication number: 20040226390
    Abstract: A processing system includes a plurality of chamber walls that define a sealed environment. A sensor is positioned in the sealed environment. In one embodiment, a power source, such as a photoelectric cell, is positioned within the environment. In another embodiment, a wireless transmission device is positioned within the sealed environment. Methods for monitoring the conditions within the sealed environment are also disclosed.
    Type: Application
    Filed: May 16, 2003
    Publication date: November 18, 2004
    Inventor: David A. Beginski
  • High temperature wafer edge sensor
    Publication number: 20040227111
    Abstract: An apparatus for detecting the presence of a substrate that is carried by an end effector of a substrate handling assembly positioned within a substrate processing system comprises a receiving member that is coupled to an end effector and a light sensor that is operatively coupled to the receiving member and is configured to detect an amount light transmitted by the receiving member. In a modified embodiment, the apparatus also includes a transmitting member that receives light from a light source and is also coupled to the end effector.
    Type: Application
    Filed: May 16, 2003
    Publication date: November 18, 2004
    Inventors: David A. Beginski, Richard Crabb, James Donald