Abstract: A capacitance probe is used by a coordinate measuring machine or machine tool to determine distances from the probe to the workpiece surface at various points over the surface. The probe is calibrated by moving it along a line, which is skewed to the surface. During this movement, a plurality of values of the capacitance and the corresponding values of the actual distance moved along the line are recorded. A datum value for the movement along the skewed line is also determined, which corresponds to a position at which the probe would touch the surface. The probe is calibrated without needing separate independent measurements of the distance from the probe to the surface. The workpiece surface is scanned using the thus-calibrate probe, in which different calibration values are used at different points on the surface, in order to account for the local shape of the surface.