Abstract: A method of packaging laser diode arrays includes the steps of forming a submount array having a plurality of submounts and an element for maintaining a precise spacing between the submounts; bonding the submounts to a substrate formed of an electrically insulating material; removing the element maintaining the precise spacing; and placing a diode bar in each of the precise spacings between adjacent submounts. For one embodiment of the invention, the submount array is formed by providing a plurality of submounts and a removable spacer between each pair of adjacent submounts, which spacers may be fixtured and are removed after the submounts are bonded to the substrate. For a second embodiment, the submount array is formed by machining a block of material from which submounts are to be formed into a plurality of submounts joined to each other by at least one attachment structure. After the submounts have been bonded to the substrate, the attachment structures may be machined away of otherwise removed.

Abstract: A modular microchannel heat exchanger for cooling a heated region and a method for making the device. A first section of the device features an array of thin copper sheets which are etched with rows of elongated holes that pierce the sheets, coated with silver and held together with the holes aligned. These holes form a microchannel having a desired aspect ratio. A second section of the device has a series of thin copper plates which are etched as apertures, coated with silver and stacked in a sequence on the sheets of the first section, the plate closest to the sheets having elongated apertures oriented transversely to the microchannel of the sheets, the apertures combining further from the sheets into circular apertures to fit a coaxial inlet and outlet conduit where unitary or pipe flow occurs.

Abstract: A cooling device formed in a thermally conductive substrate having a microstructure, such as a plurality of thermally conductive posts spaced apart by dimensions that induce capillary action in a liquid coolant. The posts extend away from the heated region and a space between the posts is supplied with liquid coolant which is contained by a meniscus near the tips of the posts. The coolant vaporizes at the meniscus and absorbs heat but, due to increased pressure in the coolant contained by the meniscus, does not boil within the space between the posts, allowing more liquid coolant contact with the thermally conductive substrate and posts. The vaporized coolant may be discharged into the air or into a chamber adjoining the tips having a lower pressure for removal of additional heat by gaseous expansion. The discharge of gaseous coolant allows the capillary flow of the liquid coolant in the space to be unimpeded, and the flow of liquid coolant may be augmented by a fluid pump.

Abstract: A cooling device formed in a thermally conductive substrate having at least one microchannel of dimensions that induce capillary action and a surface in thermal contact with a heated region. The microchannel has a longitudinal opening oriented away from the heated region and is supplied with liquid coolant which is contained by a meniscus near the opening. The coolant vaporizes at the meniscus and absorbs heat but, due to increased pressure in the coolant contained by the meniscus, does not boil within the microchannel, allowing more liquid coolant contact with the thermally conductive substrate and walls. The vaporized coolant is discharged into a chamber facing the opening which can be at a lower pressure to remove additional heat by gaseous expansion. The discharge of gaseous coolant allows the capillary flow of the liquid coolant in the microchannels to be unimpeded, and may be augmented by a fluid pump.

Abstract: A laser diode array is disclosed that includes a plurality of planar assemblies and active cooling of each assembly. The laser diode array may be operated in a long duty cycle, or in continuous operation. A laser diode bar and a microchannel heat sink are thermally coupled in a compact, thin planar assembly having the laser diode bar located proximate to one edge. In an array, a number of such thin planar assemblies are secured together in a stacked configuration, in close proximity so that the laser diodes are spaced closely. The cooling means includes a microchannel heat sink proximate to the laser diode bar to absorb heat generated by laser operation. To provide the coolant to the microchannels, each thin planar assembly comprises passageways that connect the microchannels to inlet and outlet corridors. Each inlet passageway may comprise a narrow slot that directs coolant into the microchannels and increases the velocity of flow therethrough.

Abstract: A laser diode array is disclosed that includes a plurality of planar packages and active cooling. The laser diode array may be operated in a long duty cycle, or in continuous operation. A laser diode bar and a microchannel heat sink are thermally coupled in a compact, thin planar package having the laser diode bar located proximate to one edge. In an array, a number of such thin planar packages are secured together in a stacked configuration, in close proximity so that the laser diodes are spaced closely. The cooling means includes a microchannel heat sink that is attached proximate to the laser bar so that it absorbs heat generated by laser operation. To provide the coolant to the microchannels, each thin planar package comprises a thin inlet manifold and a thin outlet manifold connected to an inlet corridor and an outlet corridor.

Abstract: Deep UV projection lithography can be performed using an e-beam pumped solid excimer UV source, a mask, and a UV reduction camera. The UV source produces deep UV radiation in the range 1700-1300A using xenon, krypton or argon; shorter wavelengths of 850-650A can be obtained using neon or helium. A thin solid layer of the gas is formed on a cryogenically cooled plate and bombarded with an e-beam to cause fluorescence. The UV reduction camera utilizes multilayer mirrors having high reflectivity at the UV wavelength and images the mask onto a resist coated substrate at a preselected demagnification. The mask can be formed integrally with the source as an emitting mask.