Patents by Inventor David C. Nelsen

David C. Nelsen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and process to control electroplating a metal onto a substrate
    Publication number: 20040256240
    Abstract: An electroplating system is provided with a rotatable head assembly including a substrate holder to secure a substrate for entry into a bath of electrolyte; and a head tilt mechanism including a stepper motor connected to the rotatable head assembly and configured to control bath entry parameters for optimal surface wetting of the substrate, upon bath entry for electroplating the substrate free of electroplating defects, including, but not limited to, swirl defects.
    Type: Application
    Filed: June 20, 2003
    Publication date: December 23, 2004
    Inventors: David C. Nelsen, Rajiv Rastogi
  • Preparing a wafer for electroplating
    Publication number: 20040069644
    Abstract: A wafer is prepared for electroplating via a spin, rinse and dry process performed on the wafer prior to electroplating. The process may be performed in a standalone tool or may be performed in a preclean module integrated into an electroplating tool.
    Type: Application
    Filed: September 30, 2002
    Publication date: April 15, 2004
    Inventors: David C. Nelsen, Rajiv Rastogi