Patents by Inventor David C. Oram

David C. Oram has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 10871395
    Abstract: A system which may be used to increase the number of available spectrum bands in an inspection system is provided. The system may include an illumination source configured to emit broadband illumination. The system may also include a filter assembly including two or more filter units. The two or more filter units may include two or more filters with one or more varying filtering characteristics. The system may also include two or more motors configured to selectively actuate selected filters of the filter units into the beam of illumination. Using the system, the number of available spectrum bands to be used in an inspection system may be increased.
    Type: Grant
    Filed: July 13, 2017
    Date of Patent: December 22, 2020
    Assignee: KLA Corporation
    Inventors: Jeremy Nesbitt, Jagadeesh Kumar, David C. Oram
  • Publication number: 20180299324
    Abstract: A system which may be used to which may be used to increase the number of available spectrum bands in an inspection system is provided. The system may include an illumination source configured to emit broadband illumination. The system may also include a filter assembly including two or more filter units. The two or more filter units may include two or more filters with one or more varying filtering characteristics. The system may also include two or more motors configured to selectively actuate selected filters of the filter units into the beam of illumination. Using the system, the number of available spectrum bands to be used in an inspection system may be increased.
    Type: Application
    Filed: July 13, 2017
    Publication date: October 18, 2018
    Inventors: Jeremy Nesbitt, Jagadeesh Kumar, David C. Oram