Patents by Inventor David C. Zimmerman

David C. Zimmerman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus and method for scanning an object through a fluid stream
    Patent number: 10020207
    Abstract: An apparatus for treating the surface of a microelectronic workpiece via impingement of the surface with at least one fluid and a method for operating the apparatus are described. In particular, the apparatus includes a treatment chamber defining an interior space to treat the microelectronic workpiece with at least one fluid within the treatment chamber, and a movable chuck that supports the workpiece within the treatment chamber. The apparatus further includes a workpiece translational drive system configured to translate the movable chuck between a workpiece load position and at least one processing position at which the workpiece is treated with the at least one fluid using at least one nozzle connected to at least one fluid supply, and a workpiece rotational drive system configured to rotate the microelectronic workpiece.
    Type: Grant
    Filed: March 23, 2016
    Date of Patent: July 10, 2018
    Assignee: TEL FSI, INC.
    Inventors: Mark Goluch, David C. Zimmerman, Robert E. Larson, Edward Deneen Hanzlik, Gregory Paul Thomes, Christina Ann Rathman
  • APPARATUS AND METHOD FOR SCANNING AN OBJECT THROUGH A FLUID STREAM
    Publication number: 20160276182
    Abstract: An apparatus for treating the surface of a microelectronic workpiece via impingement of the surface with at least one fluid and a method for operating the apparatus are described. In particular, the apparatus includes a treatment chamber defining an interior space to treat the microelectronic workpiece with at least one fluid within the treatment chamber, and a movable chuck that supports the workpiece within the treatment chamber. The apparatus further includes a workpiece translational drive system configured to translate the movable chuck between a workpiece load position and at least one processing position at which the workpiece is treated with the at least one fluid using at least one nozzle connected to at least one fluid supply, and a workpiece rotational drive system configured to rotate the microelectronic workpiece.
    Type: Application
    Filed: March 23, 2016
    Publication date: September 22, 2016
    Inventors: Mark Goluch, David C. Zimmerman, Robert E. Larson, Edward Deneen Hanzlik, Gregory Paul Thomes, Christina Ann Rathman
  • Apparatus and method for scanning an object through a fluid spray
    Patent number: 9321087
    Abstract: An apparatus for treating the surface of a microelectronic workpiece via impingement of the surface with at least one fluid and a method for operating the apparatus are described. In particular, the apparatus includes a treatment chamber defining an interior space to treat the microelectronic workpiece with at least one fluid within the treatment chamber, and a movable chuck that supports the workpiece within the treatment chamber. The apparatus further includes a workpiece translational drive system configured to translate the movable chuck between a workpiece load position and at least one processing position at which the workpiece is treated with the at least one fluid using at least one nozzle connected to at least one fluid supply, and a workpiece rotational drive system configured to rotate the microelectronic workpiece.
    Type: Grant
    Filed: September 10, 2013
    Date of Patent: April 26, 2016
    Assignee: TFL FSI, Inc.
    Inventors: Mark Goluch, David C. Zimmerman, Robert E. Larson, Edward Deneen Hanzlik, Gregory Paul Thomes, Christina Ann Rathman
  • APPARATUS AND METHOD FOR SCANNING AN OBJECT THROUGH A FLUID SPRAY
    Publication number: 20150068560
    Abstract: An apparatus for treating the surface of a microelectronic workpiece via impingement of the surface with at least one fluid and a method for operating the apparatus are described. In particular, the apparatus includes a treatment chamber defining an interior space to treat the microelectronic workpiece with at least one fluid within the treatment chamber, and a movable chuck that supports the workpiece within the treatment chamber. The apparatus further includes a workpiece translational drive system configured to translate the movable chuck between a workpiece load position and at least one processing position at which the workpiece is treated with the at least one fluid using at least one nozzle connected to at least one fluid supply, and a workpiece rotational drive system configured to rotate the microelectronic workpiece.
    Type: Application
    Filed: September 10, 2013
    Publication date: March 12, 2015
    Applicant: TEL FSI, Inc.
    Inventors: Mark GOLUCH, David C. ZIMMERMAN, Robert E. LARSON, Edward Deneen HANZLIK, Gregory Paul THOMES, Christina Ann RATHMAN
  • Reduced footprint tool for automated processing of microelectronic substrates
    Patent number: 7134827
    Abstract: The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.
    Type: Grant
    Filed: September 28, 2004
    Date of Patent: November 14, 2006
    Assignee: FSI International, Inc.
    Inventors: Robert E. Larson, Sean D. Simondet, David C. Zimmerman, Todd K. Maciej, Quirin W. Matthys
  • Reduced footprint tool for automated processing of microelectronic substrates
    Patent number: 6979165
    Abstract: The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.
    Type: Grant
    Filed: November 12, 2002
    Date of Patent: December 27, 2005
    Assignee: FSI International, Inc.
    Inventors: Robert E. Larson, Sean D. Simondet, David C. Zimmerman, Todd K. Maciej, Quirin W. Matthys
  • Reduced footprint tool for automated processing of microelectronic substrates
    Publication number: 20030091410
    Abstract: The present invention provides tools and methods of processing microelectronic substrates in which the tools maintain high throughput yet have dramatically lower footprint than conventional tools. In preferred aspects, the present invention provides novel tool designs in which multiple tool functions are overlapped in the x, y, and/or z axes of the tool in novel ways.
    Type: Application
    Filed: November 12, 2002
    Publication date: May 15, 2003
    Inventors: Robert E. Larson, Sean D. Simondet, David C. Zimmerman, Todd K. Maciej, Quirin W. Matthys