Patents by Inventor David Claar

David Claar has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Semiconductor processing tool cleaning
    Patent number: 12580164
    Abstract: The present disclosure generally relates to semiconductor processing tool cleaning, such as may be included in semiconductor processing for manufacturing an integrated circuit (IC). In an example, a cleaning process is performed on an interior surface of a chamber of a semiconductor processing tool. The cleaning process includes flowing a reactive gas into an interior volume of the chamber. The interior volume is defined at least in part by the interior surface. The reactive gas consists exclusively of boron trichloride (BCl3). After performing the cleaning process, a material layer over a semiconductor substrate is etched in the chamber.
    Type: Grant
    Filed: November 30, 2022
    Date of Patent: March 17, 2026
    Assignee: TEXAS INSTRUMENTS INCORPORATED
    Inventors: Gregory McKee, David Claar
  • SEMICONDUCTOR PROCESSING TOOL CLEANING
    Publication number: 20240177977
    Abstract: The present disclosure generally relates to semiconductor processing tool cleaning, such as may be included in semiconductor processing for manufacturing an integrated circuit (IC). In an example, a cleaning process is performed on an interior surface of a chamber of a semiconductor processing tool. The cleaning process includes flowing a reactive gas into an interior volume of the chamber. The interior volume is defined at least in part by the interior surface. The reactive gas consists exclusively of boron trichloride (BCl3). After performing the cleaning process, a material layer over a semiconductor substrate is etched in the chamber.
    Type: Application
    Filed: November 30, 2022
    Publication date: May 30, 2024
    Inventors: Gregory McKee, David Claar