Abstract: Highly corrosion resistant electrically conductive contact systems suitable for semiconductor pressure sensor devices exposed to acidic, elevated temperature environments, such as automotive exhaust gas environments, are disclosed. The preferred embodiment (10) comprises a platinum top layer (26), and a tantalum lower layer (24). Both are highly electrically conductive layers and exhibit corrosion resistance to acidic environments. The top layer of the metallization also provides a suitable material for the external connectivity (e.g., wire bonding, solder bumping, chip-chip fusion). The lower layer of the metallization also serves as an adhesion layer between the top metal and lower layers, typically silicon based glasses and in some cases serves as a diffusion barrier.

Abstract: Signal conditioning of multiple sense elements is shown for providing information to a system requiring high accuracy and robust fault coverage. A first signal conditioning ASIC (10) pre-conditions the sense element data and a second system control ASIC (14) mathematically solves predetermined compensation relations based on the output of ASIC (10) and stored compensation data to fully condition the sensor output signal(s). The sense elements (1-6) are each formed by two half bridges whose inputs are pre-conditioned by separate, identical signal conditioning paths to provide highly accurate sense and diagnostic information.