Patents by Inventor David Dean Seibel

David Dean Seibel has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-rotation epitaxial growth apparatus and reactors incorporating same
    Patent number: 9637822
    Abstract: A susceptor apparatus for use in a CVD reactor includes a main platter with a central gear. The main platter has opposite first and second sides, a central recess formed in the second side, and a plurality of circumferentially spaced-apart pockets formed in the first side. The central gear is positioned within the central recess and the satellite platters are individually rotatable within the respective pockets. Each pocket has a peripheral wall with an opening in communication with the central recess. The central gear teeth extend into each of the pockets via the respective wall openings and engage a planet gear associated with each satellite platter. Rotation of the main platter about its rotational axis causes the satellite platters to rotate about their individual rotational axes.
    Type: Grant
    Filed: October 8, 2010
    Date of Patent: May 2, 2017
    Assignee: Cree, Inc.
    Inventors: Michael John Bergmann, David Todd Emerson, David Dean Seibel
  • Multi-Rotation Epitaxial Growth Apparatus and Reactors Incorporating Same
    Publication number: 20110083602
    Abstract: A susceptor apparatus for use in a CVD reactor includes a main platter with a central gear. The main platter has opposite first and second sides, a central recess formed in the second side, and a plurality of circumferentially spaced-apart pockets formed in the first side. The central gear is positioned within the central recess and the satellite platters are individually rotatable within the respective pockets. Each pocket has a peripheral wall with an opening in communication with the central recess. The central gear teeth extend into each of the pockets via the respective wall openings and engage a planet gear associated with each satellite platter. Rotation of the main platter about its rotational axis causes the satellite platters to rotate about their individual rotational axes.
    Type: Application
    Filed: October 8, 2010
    Publication date: April 14, 2011
    Inventors: Michael John Bergmann, David Todd Emerson, David Dean Seibel