Abstract: A method for responding to a voice activated request includes receiving a speech input request from a smart speaker requesting energy management data associated with energy consumption at a premises of the smart speaker. The method also includes generating a voice service request including a first query for a first data source. The first query includes a request for the energy management data. Additionally, the method includes communicating the first query to the first data source and receiving a first response to the first query from the first data source. Further, the method includes generating an audible speech output in response to the speech input request based on the first response to the first query and transmitting the audible speech output to the smart speaker. The smart speaker audibly transmits the audible speech output.

Abstract: Methods, systems, and computer-readable media for real-time call tracing in a service-oriented system are disclosed. A request comprising a trace signature is received at a service in a service-oriented system. The trace signature comprises a representation of one or more upstream services in an upstream call path associated with the request. Based at least in part on the trace signature, the service determines one or more actions to perform with respect to the request.

Abstract: A service node performs computational tasks or other operations on behalf of a meter or other network device. A meter may collect data regarding electric parameters associated with an electric distribution network. When analysis of the collected data is required, the meter may determine that it requires the resources of a service node. The meter may send a request to a directory node to identify a service node or it may send a request seeking a service node. The service node performs the analysis and sends the results of the analysis back to the meter. The service nodes supports the dynamic distributed processing of analytic services.

Abstract: An energy allocation system may include a group of agents, each agent corresponding to a device requesting an amount of energy. The energy allocation system may perform a comparison, such as a hybridized comparison, between a selected agent and each other agent included in the group. Based on the outcome of each comparison for the selected agent, an aggregated outcome for the selected agent is determined. The aggregated outcome for the selected agent is compared to a threshold for the energy allocation system. Based on the comparison of the aggregated outcome to the threshold, the selected agent either receives the requested amount of energy or receives an instruction to enter a low-power state.

Abstract: A service node performs computational tasks or other operations on behalf of a meter or other network device. A meter may collect data regarding electric parameters associated with an electric distribution network. When analysis of the collected data is required, the meter may determine that it requires the resources of a service node. The meter may send a request to a directory node to identify a service node or it may send a request seeking a service node. The service node performs the analysis and sends the results of the analysis back to the meter. The service nodes supports the dynamic distributed processing of analytic services.

Abstract: In a lithographic process, product units such as semiconductor wafers are subjected to lithographic patterning operations and chemical and physical processing operations. Alignment data or other measurements are made at stages during the performance of the process to obtain object data representing positional deviation or other parameters measured at points spatially distributed across each unit. This object data is used to obtain diagnostic information by performing a multivariate analysis to decompose a set of vectors representing the units in the multidimensional space into one or more component vectors. Diagnostic information about the industrial process is extracted using the component vectors. The performance of the industrial process for subsequent product units can be controlled based on the extracted diagnostic information.

Abstract: An energy allocation system may include a group of agents, each agent corresponding to a device requesting an amount of energy. The energy allocation system may perform a comparison, such as a hybridized comparison, between a selected agent and each other agent included in the group. Based on the outcome of each comparison for the selected agent, an aggregated outcome for the selected agent is determined. The aggregated outcome for the selected agent is compared to a threshold for the energy allocation system. Based on the comparison of the aggregated outcome to the threshold, the selected agent either receives the requested amount of energy or receives an instruction to enter a low-power state.

Abstract: In a lithographic process, product units such as semiconductor wafers are subjected to lithographic patterning operations and chemical and physical processing operations. Alignment data or other measurements are made at stages during the performance of the process to obtain object data representing positional deviation or other parameters measured at points spatially distributed across each unit. This object data is used to obtain diagnostic information by performing a multivariate analysis to decompose a set of vectors representing the units in said multidimensional space into one or more component vectors. Diagnostic information about the industrial process is extracted using the component vectors. The performance of the industrial process for subsequent product units can be controlled based on the extracted diagnostic information.

Abstract: A service node performs computational tasks or other operations on behalf of a meter or other network device. A meter may collect data regarding electric parameters associated with an electric distribution network. When analysis of the collected data is required, the meter may determine that it requires the resources of a service node. The meter may send a request to a directory node to identify a service node or it may send a request seeking a service node. The service node performs the analysis and sends the results of the analysis back to the meter. The service nodes supports the dynamic distributed processing of analytic services.

Abstract: A method for responding to a voice activated request includes receiving a speech input request from a smart speaker requesting energy management data associated with energy consumption at a premises of the smart speaker. The method also includes generating a voice service request including a first query for a first data source. The first query includes a request for the energy management data. Additionally, the method includes communicating the first query to the first data source and receiving a first response to the first query from the first data source. Further, the method includes generating an audible speech output in response to the speech input request based on the first response to the first query and transmitting the audible speech output to the smart speaker. The smart speaker audibly transmits the audible speech output.

Abstract: A pattern formed on a substrate includes first and second sub-patterns positioned adjacent one another and having respective first and second periodicities. The pattern is observed to obtain a combined signal which includes a beat component having a third periodicity at a frequency lower than that of the first and second periodicities. A measurement of performance of the lithographic process is determined by reference to a phase of the beat component. Depending how the sub-patterns are formed, the performance parameter might be critical dimension (CD) or overlay, for example. For CD measurement, one of the sub-patterns may comprise marks each having of a portion sub-divided by product-like features. The measurement can be made using an existing alignment sensor of a lithographic apparatus. Sensitivity and accuracy of the measurement can be adjusted by selection of the first and second periodicities, and hence the third periodicity.

Abstract: In a lithographic process, product units such as semiconductor wafers are subjected to lithographic patterning operations and chemical and physical processing operations. Alignment data or other measurements are made at stages during the performance of the process to obtain object data representing positional deviation or other parameters measured at points spatially distributed across each unit. This object data is used to obtain diagnostic information by performing a multivariate analysis to decompose a set of vectors representing the units in said multidimensional space into one or more component vectors. Diagnostic information about the industrial process is extracted using the component vectors. The performance of the industrial process for subsequent product units can be controlled based on the extracted diagnostic information.

Abstract: In a lithographic process, product units such as semiconductor wafers are subjected to lithographic patterning operations and chemical and physical processing operations. Alignment data or other measurements are made at stages during the performance of the process to obtain object data representing positional deviation or other parameters measured at points spatially distributed across each unit. This object data is used to obtain diagnostic information by performing a multivariate analysis to decompose a set of vectors representing the units in said multidimensional space into one or more component vectors. Diagnostic information about the industrial process is extracted using the component vectors. The performance of the industrial process for subsequent product units can be controlled based on the extracted diagnostic information.

Abstract: A method of correcting an image characteristic of a substrate onto which one or more product features have been formed using a lithographic process, and an associated inspection apparatus method. The method includes measuring an error in the image characteristic of the substrate, and determining a correction for a subsequent formation of the product features based upon the measured error and a characteristic of one or more of the product feature(s).

Abstract: An IP packet may include an IP header and one or more optional IP extension headers. The packet may contain non-IP protocol data in one of the IP extension headers. An application that uses non-IP protocol data may use the non-IP protocol data from the IP extension header. This allows an application designed for a non-IP protocol stack to operate on a device with an IP protocol stack with minimal modification. The non-IP protocol data may alternatively support non-IP routing options within a network or sub-network.

Abstract: A method of correcting an image characteristic of a substrate onto which one or more product features have been formed using a lithographic process, and an associated inspection apparatus method. The method includes measuring an error in the image characteristic of the substrate, and determining a correction for a subsequent formation of the product features based upon the measured error and a characteristic of one or more of the product feature(s).

Abstract: In a lithographic process, product units such as semiconductor wafers are subjected to lithographic patterning operations and chemical and physical processing operations. Alignment data or other measurements are made at stages during the performance of the process to obtain object data representing positional deviation or other parameters measured at points spatially distributed across each unit. This object data is used to obtain diagnostic information by performing a multivariate analysis to decompose a set of vectors representing the units in said multidimensional space into one or more component vectors. Diagnostic information about the industrial process is extracted using the component vectors. The performance of the industrial process for subsequent product units can be controlled based on the extracted diagnostic information.

Abstract: An IP packet may include an IP header and one or more optional IP extension headers. The packet may contain non-IP protocol data in one of the IP extension headers. An application that uses non-IP protocol data may use the non-IP protocol data from the IP extension header. This allows an application designed for a non-IP protocol stack to operate on a device with an IP protocol stack with minimal modification. The non-IP protocol data may alternatively support non-IP routing options within a network or sub-network.

Abstract: An IP packet may include an IP header and one or more optional IP extension headers. The packet may contain non-IP protocol data in one of the IP extension headers. An application that uses non-IP protocol data may use the non-IP protocol data from the IP extension header. This allows an application designed for a non-IP protocol stack to operate on a device with an IP protocol stack with minimal modification. The non-IP protocol data may support routing options within a network or sub-network.

Abstract: An alignment measurement system measures an alignment target on an object. A measurement illuminates the target and is reflected. The reflected measurement beam is split and its parts are differently polarized. A detector receives the reflected measurement beam. A processing unit determines alignment on the basis of the measurement beam received by the detector. An alternative arrangement utilizes an optical dispersive fiber to guide a multi-wavelength measurement beam reflected from the object to a detector.