Patents by Inventor David E. Aspnes

David E. Aspnes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240132483
    Abstract: Provided herein are 6-carboxylic acids of benzimidazoles and 4-aza-, 5-aza-, and 7-aza-benzimidazoles as GLP-1R agonists, processes to make said compounds, and methods comprising administering said compounds to a mammal in need thereof.
    Type: Application
    Filed: November 20, 2023
    Publication date: April 25, 2024
    Applicant: Pfizer Inc.
    Inventors: Gary Erik Aspnes, Scott W. Bagley, Edward L. Conn, John M. Curto, David J. Edmonds, Mark E. Flanagan, Kentaro Futatsugi, David A. Griffith, Kim Huard, Chris Limberakis, Alan M. Mathiowetz, David W. Piotrowski, Roger B. Ruggeri
  • Patent number: 7355708
    Abstract: A normal incidence rotating compensator ellipsometer includes an illumination source that produces a broadband probe beam. The probe beam is redirected by a beam splitter to be normally incident on a sample under test. Before reaching the sample, the probe beam is passed through a rotating compensator. The probe beam is reflected by the sample and passes through the rotating compensator a second time before reaching a detector. The detector converts the reflected probe beam into equivalent signals for analysis.
    Type: Grant
    Filed: December 13, 2006
    Date of Patent: April 8, 2008
    Assignee: KLA-Tencor Corporation
    Inventor: David E. Aspnes
  • Patent number: 7173700
    Abstract: A normal incidence rotating compensator ellipsometer includes an illumination source that produces a broadband probe beam. The probe beam is redirected by a beam splitter to be normally incident on a sample under test. Before reaching the sample, the probe beam is passed through a rotating compensator. The probe beam is reflected by the sample and passes through the rotating compensator a second time before reaching a detector. The detector converts the reflected probe beam into equivalent signals for analysis.
    Type: Grant
    Filed: May 6, 2004
    Date of Patent: February 6, 2007
    Assignee: Therma-Wave, Inc.
    Inventor: David E. Aspnes
  • Patent number: 6831743
    Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135° to 225°, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously.
    Type: Grant
    Filed: September 2, 2003
    Date of Patent: December 14, 2004
    Assignee: Therma-Wave, Inc.
    Inventors: David E. Aspnes, Jon Opsal
  • Publication number: 20040042009
    Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135° to 225°, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously.
    Type: Application
    Filed: September 2, 2003
    Publication date: March 4, 2004
    Inventors: David E. Aspnes, Jon Opsal
  • Patent number: 6650415
    Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135° to 225°, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously.
    Type: Grant
    Filed: July 26, 2002
    Date of Patent: November 18, 2003
    Assignee: Therma-Wave, Inc.
    Inventors: David E. Aspnes, Jon Opsal
  • Publication number: 20020191186
    Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135° to 225°, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously.
    Type: Application
    Filed: July 26, 2002
    Publication date: December 19, 2002
    Inventors: David E. Aspnes, Jon Opsal
  • Patent number: 6449043
    Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135° to 225°, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously.
    Type: Grant
    Filed: August 31, 2001
    Date of Patent: September 10, 2002
    Assignee: Therma-Wave, Inc.
    Inventors: David E. Aspnes, Jon Opsal
  • Patent number: 6411385
    Abstract: An optical measurement system for evaluating a reference sample that has at least a partially known composition. The optical measurement system includes a reference ellipsometer and at least one non-contact optical measurement device. The reference ellipsometer includes a light generator, an analyzer and a detector. The light generator generates a beam of quasi-monochromatic light having a known wavelength and a known polarization for interacting with the reference sample. The beam is directed at a non-normal angle of incidence relative to the reference sample to interact with the reference sample. The analyzer creates interference between the S and P polarized components in the light beam after the light beam has interacted with reference sample. The detector measures the intensity of the light beam after it has passed through the analyzer.
    Type: Grant
    Filed: June 21, 2001
    Date of Patent: June 25, 2002
    Assignee: Therma-Wave, Inc.
    Inventors: David E. Aspnes, Jon Opsal, Jeffrey T. Fanton
  • Patent number: 6411381
    Abstract: A spectroscopy system having enhanced noise reduction that comprises (i) an arc lamp light source of emitted light, which emitted light is projected as an image of the light source; (ii) a slit aperture through which the emitted light is projected; and (iii) a detector operably associated with the slit aperture for detecting the emitted light. The slit aperture, the arc lamp, and the image of the arc lamp each have a major axis. The major axis of the slit aperture is oriented essentially orthogonally to the major axis of the image of the arc lamp, so that the signal-to-noise ratio of the spectroscopy system is improved as compared to the signal-to-noise ratio of the spectroscopy system when the major axis of the slit aperture is oriented essentially parallel to the major axis of the image of the arc lamp.
    Type: Grant
    Filed: May 2, 2000
    Date of Patent: June 25, 2002
    Assignee: North Carolina State University
    Inventors: David E. Aspnes, Martin Ebert
  • Publication number: 20020018205
    Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135° to 225°, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously.
    Type: Application
    Filed: August 31, 2001
    Publication date: February 14, 2002
    Inventors: David E. Aspnes, Jon Opsal
  • Publication number: 20010046049
    Abstract: An optical measurement system for evaluating a reference sample that has at least a partially known composition. The optical measurement system includes a reference ellipsometer and at least one non-contact optical measurement device. The reference ellipsometer includes a light generator, an analyzer and a detector. The light generator generates a beam of quasi-monochromatic light having a known wavelength and a known polarization for interacting with the reference sample. The beam is directed at a non-normal angle of incidence relative to the reference sample to interact with the reference sample. The analyzer creates interference between the S and P polarized components in the light beam after the light beam has interacted with reference sample. The detector measures the intensity of the light beam after it has passed through the analyzer.
    Type: Application
    Filed: June 21, 2001
    Publication date: November 29, 2001
    Inventors: David E. Aspnes, Jon Opsal, Jeffrey T. Fanton
  • Patent number: 6320657
    Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135° to 225°, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously.
    Type: Grant
    Filed: July 19, 2000
    Date of Patent: November 20, 2001
    Assignee: Therma-Wave, Inc.
    Inventors: David E. Aspnes, Jon Opsal
  • Patent number: 6304326
    Abstract: An optical measurement system for evaluating a reference sample that has at least a partially known composition. The optical measurement system includes a reference ellipsometer and at least one non-contact optical measurement device. The reference ellipsometer includes a light generator, an analyzer and a detector. The light generator generates a beam of quasi-monochromatic light having a known wavelength and a known polarization for interacting with the reference sample. The beam is directed at a non-normal angle of incidence relative to the reference sample to interact with the reference sample. The analyzer creates interference between the S and P polarized components in the light beam after the light beam has interacted with reference sample. The detector measures the intensity of the light beam after it has passed through the analyzer.
    Type: Grant
    Filed: February 8, 1999
    Date of Patent: October 16, 2001
    Assignee: Therma-wave, Inc.
    Inventors: David E. Aspnes, Jon Opsal, Jeffrey T. Fanton
  • Patent number: 6181421
    Abstract: An ellipsometer for evaluating a sample includes a light generator that generates a beam of light having a known polarization for interacting with the sample. A polarimeter of the ellipsometer includes a compensator, an analyzer and a detector. The compensator is formed of an optically uniaxial material. The compensator has a planar front face, and a planar rear face that is substantially parallel to the front face. The compensator is configured such that one ordinary axis of the crystal, but not the second ordinary axis of the crystal, lies in the plane of the front face. The compensator is positioned in the path of the light beam such that the light beam is normally incident to the front face of the compensator. As such, the ordinary ray is not displaced as it passes through the compensator. The ellipsometer further includes means for rotating the compensator about an axis that is perpendicular to both the front face and to the rear face.
    Type: Grant
    Filed: November 5, 1999
    Date of Patent: January 30, 2001
    Assignee: Therma-Wave, Inc.
    Inventors: David E. Aspnes, Joanne Yu Man Law
  • Patent number: 6134012
    Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135.degree. to 225.degree., and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously.
    Type: Grant
    Filed: June 30, 1999
    Date of Patent: October 17, 2000
    Assignee: Therma-Wave, Inc.
    Inventors: David E. Aspnes, Jon Opsal
  • Patent number: 5973787
    Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135.degree. to 225.degree., and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously.
    Type: Grant
    Filed: May 12, 1998
    Date of Patent: October 26, 1999
    Assignee: Therma-Wave, Inc.
    Inventors: David E. Aspnes, Jon Opsal
  • Patent number: 5900939
    Abstract: An optical measurement system for evaluating a reference sample that has at least a partially known composition. The optical measurement system includes a reference ellipsometer and at least one non-contact optical measurement device. The reference ellipsometer includes a light generator, an analyzer and a detector. The light generator generates a beam of quasimonochromatic light having a known wavelength and a known polarization for interacting with the reference sample. The beam is directed at a non-normal angle of incidence relative to the reference sample to interact with the reference sample. The analyzer creates interference between the S and P polarized components in the light beam after the light beam has interacted with reference sample. The detector measures the intensity of the light beam after it has passed through the analyzer.
    Type: Grant
    Filed: June 17, 1998
    Date of Patent: May 4, 1999
    Assignee: Therma-Wave, Inc.
    Inventors: David E. Aspnes, Jon Opsal, Jeffrey T. Fanton
  • Patent number: 5877859
    Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135.degree. to 225.degree., and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously.
    Type: Grant
    Filed: July 24, 1996
    Date of Patent: March 2, 1999
    Assignee: Therma-Wave, Inc.
    Inventors: David E. Aspnes, Jon Opsal
  • Patent number: 5798837
    Abstract: An optical measurement system for evaluating a reference sample that has at least a partially known composition. The optical measurement system includes a reference ellipsometer and at least one non-contact optical measurement device. The reference ellipsometer includes a light generator, an analyzer and a detector. The light generator generates a beam of quasi-monochromatic light having a known wavelength and a known polarization for interacting with the reference sample. The beam is directed at a non-normal angle of incidence relative to the reference sample to interact with the reference sample. The analyzer creates interference between the S and P polarized components in the light beam after the light beam has interacted with reference sample. The detector measures the intensity of the light beam after it has passed through the analyzer.
    Type: Grant
    Filed: July 11, 1997
    Date of Patent: August 25, 1998
    Assignee: Therma-Wave, Inc.
    Inventors: David E. Aspnes, Jon Opsal, Jeffrey T. Fanton