Patents by Inventor David E. Dybas

David E. Dybas has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Portable particle detector assembly
    Patent number: 5255089
    Abstract: A portable particle detector assembly for detecting particle contamination in the reaction chamber of a plasma processing tool used in semiconductor manufacture. The detector is comprised of a scanner assembly for providing a scanned laser beam and a video camera placed opposite the scanner assembly for monitoring light scattered by particles within the volume of the reaction chamber.
    Type: Grant
    Filed: March 26, 1992
    Date of Patent: October 19, 1993
    Assignee: International Business Machines Corporation
    Inventors: David E. Dybas, Kurt L. Haller, Edward F. Patterson, Gary S. Selwyn