Abstract: A bipolar plate for an electrochemical cell having a first layer, a second layer, and a third layer is disclosed. The first layer has a first plurality of through channels oriented in a first direction. The second layer has a second plurality of through channels oriented in a second different direction. The third layer is disposed between and bonded to the first and second layers. The third layer has a first set of header channels in fluid communication with the first plurality of channels, and a second set of header channels in fluid communication with the second plurality of channels. A first inlet port and a first outlet port are in fluid communication with the first set of header channels, and a second inlet port and a second outlet port are in fluid communication with the second set of header channels. The bonded third layer prevents fluid communication between the first plurality of channels and the second plurality of channels.

Abstract: A complementary conditioning system for use in chemical mechanical polishing (CMP). The present invention functions with a CMP machine adapted for polishing a semiconductor wafer having tungsten components fabricated thereon. A polishing pad is mounted on the CMP machine. The polishing pad has a polishing surface configured for polishing the semiconductor wafer and its tungsten components. The performance of the polishing surface is characterized by a polishing efficiency. A complementary end-effector is mounted on the CMP machine. The complementary end-effector is adapted to chemically complement the tungsten components on the semiconductor wafer. The complementary end-effector is further adapted to contact the polishing surface and improve the polishing efficiency by chemically enhancing the polishing surface, thereby obtaining a more efficient removal rate for the chemical mechanical polishing.

Abstract: A plasma confinement ring comprising a first generally planar surface; a second generally planar surface; an aperture extending between the first and second surfaces, the aperture including an annular surface, and a curved surface extending between the annular surface and the first planar surface.

Abstract: The present invention provides connections and methods of restricting an opening. One connection according to the subject invention is configured to restrict a mouth of a container, the mouth having an inner surface having an inside diameter and an outer surface having an outside diameter, the connection includes: a plug having a side surface of varying dimension and configured to engage the inner surface to form a seal of the side surface of the plug and the inner surface; at least one intermediate member having a first end borne by the plug and a second end distally spaced from the first end; and a securing member configured to engage the outer surface of the container and the second end of the intermediate member, the intermediate member being configured to couple the plug and the securing member and maintain the seal of the side surface of the plug with the inner surface of the container.

Abstract: Shipping carton and flap holder which prevent the spillage of loose fill materials as an article is removed from the carton. The flap holder includes a strip having first and second end portions with an adhesive on one side thereof for attachment to adjacent flaps of the carton to hold the flaps in an open position as the article is removed. It also has separately removable backings which cover the adhesive on the two end portions of the strip whereby the strip can be affixed to one flap and folded back upon itself for shipment, and thereafter the second backing can be removed and the second end portion can be folded over and affixed to the adjacent flap.

Abstract: A vacuum seal for a ball junction between a low pressure chemical vapor deposition (LPCVD) chamber and a vacuum system. In one implementation, the LPCVD chamber is a quartz tube used for deposition of certain chemicals onto and into semiconductor substrates placed therein. The ball junction is formed by the combination of a ball socket coupled at the neck of the LPCVD chamber and a metal ball cover coupled to the vacuum system. In one implementation, the metal ball cover is stainless steel. In lieu of using an elastomer O-ring that can denature under certain temperature ranges, the novel vacuum seal contains a series of annular channels cut into the inside surface of a ball cover. When the ball socket is inserted into the metal ball cover, the channels are bounded by metal on three sides and by the outside surface of the ball socket on the fourth side. Each channel contains a hole coupled to a second vacuum system.

Abstract: A rotatable flange union for use with vacuum systems includes a first flange, a second flange and a connector which connects the first flange to the second flange and allows the first flange to rotate 360 degrees with respect to the second flange. In the preferred embodiment, tubing of the first flange is placed within tubing of the second flange. Additionally, the connector includes a first quad ring seal, a second quad ring seal, and a cavity in the second flange. The first quad ring seal is in contact with an inner diameter of the second flange and is in contact with an outer diameter of the first flange. The second quad ring seal is in contact with the inner diameter of the second flange and is in contact with the outer diameter of the first flange. The cavity is between the first quad ring seal and the second quad ring seal. The cavity is pumped to a pressure of less than ten millitorr.

Abstract: An improved shielding assembly is provided for a sputter source which has an anode and cathode target-ring assembly mounted to a cylindrical mounting structure. A cooling assembly for the anode and cathode target-ring assembly is mounted to the distal end of the cylindrical mounting structure. A baffle shield member has an outer flat ring-shaped mounting base-portion which overlies the cooling assembly and from which a baffle portion inwardly extends toward the anode and cathode target-ring assembly. A shield member comprises an annular ring base portion, which is mounted over the outer flat ring-shaped mounting base-portion of the baffle shield member and from which an inner lip portion extends inwardly. The inner lip portion has a rounded contour to provide a smooth base for deposition of a smooth layer of sputtered material on said lip portion.

Abstract: A mixing and dispensing apparatus for mutually reactive chemicals. The apparatus includes a mixing chamber having a core of inexpensive monolithic design with a reciprocal. The core and purging rod are readily detachable as a unit from the remainder of the apparatus. The purging rod does not perform a valving function, and therefore significant compressive force does not need to be maintained on the mixing chamber core. The apparatus includes separate valves for each of the reactive components remote from the mixing chamber bore which are automatically opened after retraction of the purging rod, so that the chemicals are not maintained under pressure adjacent the purging rod. A visible indication of the amount of useful life remaining for the mixing chamber is also provided.

Abstract: A reconfigurable workstation (10) is illustrated having video, keyboard, and hand operated motion controller capabilities. The workstation includes main side panels (12, 14) between which a primary work panel (A) is pivotally carried in a manner in which primary work panel (A) may be adjusted and set in a negatively declined or positively inclined position for proper forearm support while operating hand controllers (34, 36). A keyboard table (B) supports a keyboard (32) in such a manner that the keyboard (32) is set in a positively inclined position with respect to the negatively declined work panel (A). Declined forearm support surfaces (26, 28) are provided on either side of an alcove (24) accommodating a seated operator with forearms of the operator supported in a declined position for proper support and operation of the hand controllers (34, 36). A visual display unit (C) is inclined with respect to primary work panel (A) so that the operator seated at alcove (24) is properly positioned.

Abstract: A method and system are described for manufacturing molded packings used in the shipment of articles such as computers, typewriters and the like. The system employs a plurality of mold plugs positioned on a rotating platform whereby the mold plugs are alternately moved between work stations. At one work station a separator sheet is manually placed over a mold plug. At another work station a foaming material dispensing gun is automatically operated in a predetermined pattern over a mold which encloses the mold plug. The pattern is manually adjustable to fit any particular mold plug. Control over the system is obtained with a microprocessor programmed to operate with sensors and actuators associated with the system.