Abstract: A burner manifold apparatus (10) for delivering reactants to a combustion site of a chemical vapor deposition process includes fluid inlets (32a, 32b), fluid outlets (49), and a plurality of fluid passages (50) extending therebetween. The fluid passages (50) converge toward each other from the fluid inlets to the fluid outlets. One embodiment includes a manifold base (12), a pressure plate (14), and a manifold burner mount (16) for mounting thereto a micromachined burner (58). The fluid passages (50) internal to the manifold base are configured to distribute symmetrically the fluid to the manifold burner mount. The fluid is then channeled through fluid passages in the manifold burner mount. The fluid passages converge, yet remain fluidly isolated from each other, and the fluid passages create a linear array for producing linear streams of fluid. Alternatively, the burner manifold apparatus may include a plurality of manifold elements in a stacked arrangement.

Abstract: A cutting fluid applicable for the machining of vitreous, crystalline or aggregate materials such as glass, glass-ceramics, ceramics, stone, concrete, silicon and the like. The cutting fluid comprises a solution containing organic molecules—in particular silanes, silanols, and siloxanes—capable of forming covalent bonds with such vitreous, crystalline or aggregate materials. The organic molecules in the cutting fluid is believed to improve the rate of manufacturing productivity, surface finish quality, and decrease the incidence of sub-surface damage caused by particulate adhesion to the cutting or abrading tool during a machining process of these kinds of substrates. The reduced clogging of cutting surfaces and increased lubricity of the cutting fluid may also prolong the useful life of the machining tools when used against these kinds of substrates.

Abstract: A cutting fluid applicable for the machining of vitreous, crystalline or aggregate materials such as glass, glass-ceramics, ceramics, stone, concrete, silicon and the like. The cutting fluid comprises a solution containing organic molecules—in particular silanes, silanols, and siloxanes—capable of forming covalent bonds with such vitreous, crystalline or aggregate materials. The organic molecules in the cutting fluid is believed to improve the rate of manufacturing productivity, surface finish quality, and decrease the incidence of sub-surface damage caused by particulate adhesion to the cutting or abrading tool during a machining process of these kinds of substrates. The reduced clogging of cutting surfaces and increased lubricity of the cutting fluid may also prolong the useful life of the machining tools when used against these kinds of substrates.

Abstract: A method for making silicon oxynitride comprising providing a vaporous gas stream of a compound selected from the group consisting of silazanes and siloxazanes. An enclosed, heated reaction site is also provided. The vaporous gas stream is delivered to the enclosed, heated reaction site in which the levels of oxygen are strictly controlled to promote the formation of silicon oxynitride particles.

Abstract: An athermalization attachment for countering changes in optical characteristics of an optical fiber or other temperature sensitive optical device in response to changes in temperature. According to one aspect of the invention, a curved composite beam is attached to the fiber. The beam comprises two layers of dissimilar materials. The layer on the outside radius has a coefficient of expansion greater than that of the layer on the inside radius, such that increases in temperature cause the outside layer to expand more rapidly than the inside layer, thereby decreasing the radius of curvature of the beam. The coefficients of expansion of the layers are chosen such that the beam's temperature response counters optical changes which would otherwise occur in the fiber in response to temperature changes. In another approach, one point on a low-expansion block is attached to a point along an optical fiber.