Patents by Inventor David Ferris
David Ferris has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Publication number: 20240070672Abstract: A computer-implemented method is provided for detecting actionable transaction risks. The method includes grouping an inbound event related to a transaction with a target event group and determining an actionable group of events that are deemed high risk and a non-actionable group of non-actionable events that are deemed low risk. The method also includes evaluating the target event group relative to the actionable and non-actionable groups of events. This includes computing a first distance between the target event group and the non-actionable group and a second distance between the target event group and actionable group. The first distance is compared with the second distance to determine if the target event group, including the inbound event, is closer to the actionable group or to the nonactionable group.Type: ApplicationFiled: August 29, 2022Publication date: February 29, 2024Inventors: John Mariano, Victor Christian, Christopher Janes, David Ferris, Paul Howard, Christopher Baril
-
Patent number: 8580076Abstract: A plasma apparatus, various components of the plasma apparatus, and an oxygen free and nitrogen free processes for effectively removing photoresist material and post etch residues from a substrate with a carbon and/or hydrogen containing low k dielectric layer(s).Type: GrantFiled: May 22, 2003Date of Patent: November 12, 2013Assignee: LAM Research CorporationInventors: Alan Frederick Becknell, Thomas James Buckley, David Ferris, Richard E. Pingree, Jr., Palanikumaran Sakthivel, Aseem Kumar Srivastava, Carlo Waldfried
-
Patent number: 7449416Abstract: A plasma ashing process for removing photoresist material and post etch residues from a substrate comprising carbon, hydrogen, or a combination of carbon and hydrogen, wherein the substrate comprises a low k dielectric layer, the process comprising forming a plasma from an essentially oxygen free and nitrogen free gas mixture; introducing the plasma into a process chamber, wherein the process chamber comprises a baffle plate assembly in fluid communication with the plasma; flowing the plasma through the baffle plate assembly and removing photoresist material, post etch residues, and volatile byproducts from the substrate; periodically cleaning the process chamber by introducing an oxygen plasma into the process chamber; and cooling the baffle plate assembly by flowing a cooling gas over the baffle plate assembly.Type: GrantFiled: September 1, 2005Date of Patent: November 11, 2008Assignee: Axcelis Technologies, Inc.Inventors: Alan F. Becknell, Philip Hammar, David Ferris
-
Patent number: 7163587Abstract: A reactor assembly and processing method for treating a substrate generally includes a base unit, a chuck assembly, a process chamber, an inlet manifold assembly and an exit manifold assembly. The inlet manifold assembly is in fluid communication with a first opening of the process chamber, wherein the inlet manifold assembly comprises a flow-shaping portion adapted to laterally elongate a gas and/or a reactant flow into the process chamber. The exhaust manifold assembly in fluid communication with a second opening of the process chamber and is diametrically opposed to the inlet manifold assembly. The process includes flowing a gas and/or reactive species into the process chamber of the reactor assembly in a direction that is about planar with the substrate surface providing improved uniformity and increased reactivity.Type: GrantFiled: February 8, 2002Date of Patent: January 16, 2007Assignee: Axcelis Technologies, Inc.Inventors: David William Kinnard, David Ferris
-
Publication number: 20060046470Abstract: A plasma ashing process for removing photoresist material and post etch residues from a substrate comprising carbon, hydrogen, or a combination of carbon and hydrogen, wherein the substrate comprises a low k dielectric layer, the process comprising forming a plasma from an essentially oxygen free and nitrogen free gas mixture; introducing the plasma into a process chamber, wherein the process chamber comprises a baffle plate assembly in fluid communication with the plasma; flowing the plasma through the baffle plate assembly and removing photoresist material, post etch residues, and volatile byproducts from the substrate; periodically cleaning the process chamber by introducing an oxygen plasma into the process chamber; and cooling the baffle plate assembly by flowing a cooling gas over the baffle plate assembly.Type: ApplicationFiled: September 1, 2005Publication date: March 2, 2006Inventors: Alan Becknell, Philip Hammar, David Ferris
-
Publication number: 20050241767Abstract: A plasma processing system includes at least one multi-piece baffle plate. The multi-piece baffle plate assembly generally comprises at least one annular shaped ring portion having an opening and an insert portion dimensioned to sit within the opening. The individual pieces can be formed of a ceramic material. The effects caused by thermal gradients in the plate during plasma processing are minimized.Type: ApplicationFiled: April 30, 2004Publication date: November 3, 2005Inventors: David Ferris, Aseem Srivastava, Maw Tun
-
Patent number: 6897615Abstract: An apparatus and process for enhancing the ignition of a gas to form a plasma in a plasma tool. The apparatus and process includes the use of a plasma tube to locally enhance the applied electric field so that plasma can be initiated at higher pressures, at lower electric fields, and/or in otherwise difficult gases to ignite. The plasma tube includes at least one conductive fiber secured to the tube. A process for enhancing the local electric field includes coupling the plasma tube to an energy source such as microwave energy, radiofrequency energy, or a combination comprising at least one of the foregoing energy sources.Type: GrantFiled: November 1, 2001Date of Patent: May 24, 2005Assignee: Axcelis Technologies, Inc.Inventors: Alan C. Janos, David Ferris, Ivan Berry, Michael G. Ury
-
Publication number: 20040238123Abstract: A plasma apparatus, various components of the plasma apparatus, and an oxygen free and nitrogen free processes for effectively removing photoresist material and post etch residues from a substrate with a carbon and/or hydrogen containing low k dielectric layer(s).Type: ApplicationFiled: May 22, 2003Publication date: December 2, 2004Applicant: AXCELIS TECHNOLOGIES, INC.Inventors: Alan Frederick Becknell, Thomas James Buckley, David Ferris, Richard E. Pingree, Palanikumaran Sakthivel, Aseem Kumar Srivastava, Carlo Waldfried
-
Patent number: 6698172Abstract: A lawn mower includes a front wheel suspension system as well as a rear wheel suspension system. The front wheel suspension system includes upper and lower suspension struts that are pivotably connected between a main frame of the lawn mower and a longitudinal suspension strut that is connected to a front wheel. A spring is connected between an extension of the upper suspension strut and a front transverse member of the main frame. The rear wheel suspension system includes upper and lower links that are pivotably connected between vertical struts that are connected between upper and lower frame members of the main frame and a motor mount. A spring is connected between a spring bracket extending from the upper frame member and either the motor mount or a motor mounted in the motor mount. In order to prevent scalping while turning, a floating cutter deck is suspended from the front and rear wheel suspension systems rather than from the main frame or chassis of the mower.Type: GrantFiled: October 16, 2001Date of Patent: March 2, 2004Assignee: Ferris Industries, Inc.Inventors: David Ferris, Todd B. Gordon, Henry Nordberg
-
Publication number: 20030150560Abstract: A reactor assembly and processing method for treating a substrate generally includes a base unit, a chuck assembly, a process chamber, an inlet manifold assembly and an exit manifold assembly. The inlet manifold assembly is in fluid communication with a first opening of the process chamber, wherein the inlet manifold assembly comprises a flow-shaping portion adapted to laterally elongate a gas and/or a reactant flow into the process chamber. The exhaust manifold assembly in fluid communication with a second opening of the process chamber and is diametrically opposed to the inlet manifold assembly. The process includes flowing a gas and/or reactive species into the process chamber of the reactor assembly in a direction that is about planar with the substrate surface providing improved uniformity and increased reactivity.Type: ApplicationFiled: February 8, 2002Publication date: August 14, 2003Inventors: David William Kinnard, David Ferris
-
Patent number: 6510678Abstract: A lawn mower includes a front wheel suspension system as well as a rear wheel suspension system. A load compensation adjuster is employed as part of the rear wheel suspension system that compensates for riders having significantly differing weights, as well as for weight changes occurring during the mowing operation, such as from grass clippings accumulating in a grass catcher bag.Type: GrantFiled: June 12, 2001Date of Patent: January 28, 2003Assignee: Ferris Industries, Inc.Inventors: David Ferris, William Shea, Henry Nordberg
-
Patent number: 6460318Abstract: A lawn mower includes a front wheel suspension system as well as a rear wheel suspension system. The front wheel suspension system includes upper and lower suspension struts that are pivotably connected between a main frame of the lawn mower and a longitudinal suspension strut that is connected to a front wheel. A spring is connected between an extension of the upper suspension strut and a front transverse member of the main frame. The rear wheel suspension system includes upper and lower links that are pivotably connected between vertical struts that are connected between upper and lower frame members of the main frame and a motor mount. A spring is connected between a spring bracket extending from the upper frame member and either the motor mount or a motor mounted in the motor mount. In order to prevent scalping while turning, a floating cutter deck is suspended from the front and rear wheel suspension systems rather than from the main frame or chassis of the mower.Type: GrantFiled: July 22, 1999Date of Patent: October 8, 2002Assignee: Ferris Industries, Inc.Inventors: David Ferris, Todd B. Gordon, Henry Nordberg
-
Publication number: 20020135308Abstract: An apparatus and process for enhancing the ignition of a gas to form a plasma in a plasma tool. The apparatus and process includes the use of a plasma tube to locally enhance the applied electric field so that plasma can be initiated at higher pressures, at lower electric fields, and/or in otherwise difficult gases to ignite. The plasma tube includes at least one conductive fiber secured to the tube. A process for enhancing the local electric field includes coupling the plasma tube to an energy source such as microwave energy, radiofrequency energy, or a combination comprising at least one of the foregoing energy sources.Type: ApplicationFiled: November 1, 2001Publication date: September 26, 2002Inventors: Alan C. Janos, David Ferris, Ivan Berry, Michael G. Ury
-
Publication number: 20020035824Abstract: A lawn mower includes a front wheel suspension system as well as a rear wheel suspension system. A load compensation adjuster is employed as part of the rear wheel suspension system that compensates for riders having significantly differing weights, as well as for weight changes occurring during the mowing operation, such as from grass clippings accumulating in a grass catcher bag.Type: ApplicationFiled: June 12, 2001Publication date: March 28, 2002Applicant: Ferris Industries, Inc.Inventors: David Ferris, William Shea, Henry Nordberg
-
Publication number: 20020023420Abstract: A lawn mower includes a front wheel suspension system as well as a rear wheel suspension system. The front wheel suspension system includes upper and lower suspension struts that are pivotably connected between a main frame of the lawn mower and a longitudinal suspension strut that is connected to a front wheel. A spring is connected between an extension of the upper suspension strut and a front transverse member of the main frame. The rear wheel suspension system includes upper and lower links that are pivotably connected between vertical struts that are connected between upper and lower frame members of the main frame and a motor mount. A spring is connected between a spring bracket extending from the upper frame member and either the motor mount or a motor mounted in the motor mount. In order to prevent scalping while turning, a floating cutter deck is suspended from the front and rear wheel suspension systems rather than from the main frame or chassis of the mower.Type: ApplicationFiled: October 16, 2001Publication date: February 28, 2002Applicant: Ferris Industries, Inc.Inventors: David Ferris, Todd B. Gordon, Henry Nordberg
-
Patent number: 6244025Abstract: A lawn mower includes a front wheel suspension system as well as a rear wheel suspension system. A load compensation adjuster is employed as part of the rear wheel suspension system that compensates for riders having significantly differing weights, as well as for weight changes occurring during the mowing operation, such as from grass clippings accumulating in a grass catcher bag.Type: GrantFiled: August 27, 1999Date of Patent: June 12, 2001Assignee: Ferris Industries, Inc.Inventors: David Ferris, William Shea, Henry Nordberg