Abstract: Embodiments of the invention provide a method and apparatus, such as a processing chamber, suitable for etching high aspect ratio features. Other embodiments include a showerhead assembly for use in the processing chamber. In one embodiment, a processing chamber includes a chamber body having a showerhead assembly and substrate support disposed therein. The showerhead assembly includes at least two fluidly isolated plenums, a region transmissive to an optical metrology signal, and a plurality of gas passages formed through the showerhead assembly fluidly coupling the plenums to the interior volume of the chamber body.

Abstract: A method of collecting runtime information for an application in a computing system includes locating trace statements in a source code of the application, collecting information regarding the trace statements, and outputting the information for use by a user. A system for collecting runtime information for an application in a computing system includes a locate module, a collect module, and an output module. The locate module locates trace statements in a source code of an application. The collect module collects information regarding the trace statements. The output module outputs the information for use by a user.

Abstract: Methods, systems, and computer program products for correlating trace events to facilitate analysis based on how the trace events are related. Relationship information that defines relationships between logical operations is maintained within a correlation identifier stack. A correlation identifier that marks the occurrence of a logical operation is obtained for executing software and stored in the correlation identifier stack. A trace event is generated that comprises both the correlation identifier stack and an initial event payload to describe the runtime behavior of the executing software. The trace event is stored to a trace log for subsequent analysis of the executing software based on the logical operation relationship information in the correlation identifier stack and the initial correlation identifier that marks the occurrence of the logical operation. Upon obtaining an indication that the logical operation has ended, the correlation identifier is removed from the correlation identifier stack.

Abstract: A method for using an organic dielectric as a sacrificial layer for forming suspended or otherwise spaced structures. The use of an organic dielectric has a number of advantages, including allowing use of an organic solvent or etch to remove the sacrificial layer. Organic solvents only remove organic materials, and thus do not affect or otherwise damage non-organic layers such as metal layers. This may reduce or eliminate the need for the rinsing and drying steps often associated with the use of acidic etchants such as Hydrofluoric Acid.

Abstract: A network element with network element storage and independent intelligence may be configured to provide temporary mass storage to facilitate the transfer of large files across an optical network. The network element may also be provided with intelligence to enable the network element to maintain a higher level understanding of the data flows. Using network element storage enables network elements involved in data transmission across the network to temporarily store data being transferred on the network. This allows parcels of data to be transmitted part way through the network when a complete path through the network is not available. It also allows data to be aggregated at strategic locations on the network, such as at the location of a transmission bandwidth mismatch, to enable the data to be transmitted over the high capacity optical resource at a higher rate, thus more efficiently utilizing the bandwidth on the higher bandwidth resource.

Abstract: A method for using an organic dielectric as a sacrificial layer for forming suspended or otherwise spaced structures. The use of an organic dielectric has a number of advantages, including allowing use of an organic solvent or etch to remove the sacrificial layer. Organic solvents only remove organic materials, and thus do not affect or otherwise damage non-organic layers such as metal layers. This may reduce or eliminate the need for the rinsing and drying steps often associated with the use of acidic etchants such as Hydrofluoric Acid.

Abstract: Device comprising a substrate and a metallized sensor/heater element having a temperature coefficient of resistance of at least 2000 parts per million. Methods of fabricating the devices are also disclosed.