Abstract: A position sensor and a method for sensing a position of a moveable member includes at least first and second deflectable members arranged so as to allow the moveable member to pass therebetween and cause the at least first and second moveable members to deflect in proportion to the position of the moveable member relative to the first and second deflectable members. In one example of the present invention, the deflectable members are cantilever-mounted members extending in generally the same direction. The amount of resultant deflection is measured by any suitable means. For example, each deflectable member may have a Wheatstone bridge provided thereon acting as a strain gauge in a known manner, such that the strain detected is proportional to the amount of deflection. In a particular example of the present invention, some of the elements of a first Wheatstone bridge are provided on the first deflectable member and some are provided on the second deflectable member.

Abstract: A position sensor and a method for sensing a position of a moveable member includes at least first and second deflectable members arranged so as to allow the moveable member to pass therebetween and cause the at least first and second moveable members to deflect in proportion to the position of the moveable member relative to the first and second deflectable members. In one example of the present invention, the deflectable members are cantilever-mounted members extending in generally the same direction. The amount of resultant deflection is measured by any suitable means. For example, each deflectable member may have a Wheatstone bridge provided thereon acting as a strain gauge in a known manner, such that the strain detected is proportional to the amount of deflection. In a particular example of the present invention, some of the elements of a first Wheatstone bridge are provided on the first deflectable member and some are provided on the second deflectable member.

Abstract: A pressure transducer (26) is disclosed. A multiplicity of signal plates (Cs, Cr, Csf, Crf) are disposed on a first quartz disc (88). Opposing the signal plates (Cs, Cr, Csf, Crf) across a gap formed by an annular frit (92) is a common plate (94) disposed on a second quartz disc (86). The signal plates (Cs, Cr, Csf, Crf) and common plate (94) form capacitors which are operable to modulate alternating excitation signals applied to the signal plates. The capacitances vary the modulation during deflections of the discs (86, 88) as a result of pressure changes, and the common plate (94) algebraically sums the modulated excitation signals into a single output from the transducer (26).

Abstract: A quartz capacitive pressure transducer including a sensing plate and a reference plate disposed on one quartz substrate which are opposed across a gap by a common plate on another quartz substrate to form capacitances. The substrates are maintained in their opposing relationship by an annular frit which seals a chamber between the substrates to a reference pressure. The reference plate is disposed in the area occupied by the frit annulus to provide a reference capacitance that has a zero pressure gradient.