Patents by Inventor David Haggart

David Haggart has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Polishing head for wafer, and method for polishing
    Patent number: 6375549
    Abstract: A polishing head (200) for a chemical-mechanical polishing machine that holds a semiconductor wafer (150) against a polishing pad (140) has a chuck (295) with a pressure chamber (210) to apply a down force substantially equally to the wafer backside (152). An electrode arrangement (270) within the chamber (210) is located coplanar to the wafer (150) to provide compensation to wafer or chuck irregularities by applying a compensation force having a distribution corresponding to the irregularities.
    Type: Grant
    Filed: March 17, 2000
    Date of Patent: April 23, 2002
    Assignee: Motorola, Inc.
    Inventors: Walter Glashauser, Lutz Teichgräber, David Haggart, Katrin Ebner