Patents by Inventor David Harold WHYSONG

David Harold WHYSONG has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method and apparatus for design of a metrology target
    Patent number: 10296692
    Abstract: A method of metrology target design is described. The method includes providing a range or a plurality of values for design parameter of a metrology target and by a processor, selecting, by solving for and/or sampling within the range or the plurality of values for the design parameters, a plurality of metrology target designs having one or more design parameters meeting a constraint for a design parameter of the metrology target.
    Type: Grant
    Filed: December 19, 2014
    Date of Patent: May 21, 2019
    Assignee: ASML Netherlands B.V.
    Inventors: Guangqing Chen, Justin Ghan, David Harold Whysong
  • METHOD AND APPARATUS FOR DESIGN OF A METROLOGY TARGET
    Publication number: 20150186582
    Abstract: A method of metrology target design is described. The method includes providing a range or a plurality of values for design parameter of a metrology target and by a processor, selecting, by solving for and/or sampling within the range or the plurality of values for the design parameters, a plurality of metrology target designs having one or more design parameters meeting a constraint for a design parameter of the metrology target.
    Type: Application
    Filed: December 19, 2014
    Publication date: July 2, 2015
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Guangqing CHEN, Justin GHAN, David Harold WHYSONG