Abstract: In one embodiment, a system includes a wafer handling system, processing components, a controller, a virtual assistant, a natural language processing (NLP) engine, and a data-analytics engine. The wafer handling system is configured to hold one or more wafers for processing. The processing components is configured to physically treat the one or more wafers. The controller is configured to operate the processing components. The virtual assistant, in communication with the NLP engine, is configured to receive a user query from a user, understand an intent or context of the user query, and provide a context-specific response to the user query. The data-analytics engine is configured to generate and provide analytical data relating to the user query based on data collected from a plurality of data sources via one or more communication protocols.

Abstract: In one embodiment, a system includes a wafer handling system, processing components, a controller, a virtual assistant, and a natural language processing (NLP) engine. The wafer handling system is configured to hold one or more wafers for processing. The processing components is configured to physically treat the one or more wafers. The controller is configured to operate the processing components. The virtual assistant, in communication with the NLP engine, is configured to receive a user query from a user, understand an intent or context of the user query, and provide a context-specific response to the user query.